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Charged particle photographing device for parallel matching beams

A technology of charged particles and matching beams, which is applied in the use of radiation for material analysis, etc., can solve problems such as image blur and unfavorable photographic resolution, and achieve the effects of reducing influence, improving resolution, and improving resolution

Inactive Publication Date: 2015-09-16
INST OF FLUID PHYSICS CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the non-axisymmetric focusing magnetic lens commonly used at present, the matching condition of the beam current is the point light source beam, which is a serious image blurring factor in many experimental situations, which is not conducive to improving the resolution of photography

Method used

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  • Charged particle photographing device for parallel matching beams
  • Charged particle photographing device for parallel matching beams
  • Charged particle photographing device for parallel matching beams

Examples

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Embodiment 1

[0024] Such as Figure 1-2 As shown, the present invention includes a beam transmission line and an optical imaging structure. The beam transmission line includes a centrally symmetrical front quadrupole magnet group 3 and a rear quadrupole magnet group 5. The optical imaging structure is located at the end of the beam transmission line, wherein Front segment quadrupole magnet group 3 and rear segment quadrupole magnet group 5 are identical in shape and all comprise four completely identical quadrupole magnets, and on the central symmetrical point of front segment quadrupole magnet group 3 and rear segment quadrupole magnet group 5 The angle collimator 4 is installed, and the transmission matrix of the quadrupole magnet group 3 in the front section adopts a fourth-order matrix M:

[0025] The fourth-order matrix M is to satisfy the parallel beam incident condition: M 11 = 0, M 22 = 0, M 33 = 0, M 44 = 0 of the fourth-order transfer matrix, the front and rear subscripts of ...

Embodiment 2

[0097] This embodiment is preferably as follows on the basis of Embodiment 1: there are two four-stage magnets located above the horizontal axis in the front quadrupole magnet group 3, and the other two four-stage magnets are located below the horizontal axis, and the four-stage magnets located above the horizontal axis and the four-level magnets located below the horizontal axis are alternately arranged at equal intervals along the horizontal direction.

[0098] In this scheme, according to the energy of the charged particle beam used, a quadrupole magnet suitable for the energy is selected; and the distance between the magnets is reasonably set according to the strength of the quadrupole magnet and the size of the site; using the matching function of the software, according to (27)-(30) these four constraints, calculate the strength of the quadrupole magnet. Among them, the four-stage magnets A1 and A3 in the front quadrupole magnet group 3 and the four-stage magnets B1 and ...

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Abstract

The invention discloses a charged particle photographing device for parallel matching beams. The device comprises a beam transmission line and an optical imaging structure, wherein the beam transmission line comprises a front-section quadrupole magnet group and a rear-section quadrupole magnet group in a central symmetry manner; the optical imaging structure is positioned at the tail end of the beam transmission line; the front-section quadrupole magnet group and the rear-section quadrupole magnet group have the identical shape and respectively comprise four identical quadrupole magnets; an angle collimator is arranged on the central symmetry point of the front-section quadrupole magnet group and the rear-section quadrupole magnet group; a transmission matrix of the front-section quadrupole magnet group adopts a four-order matrix M; the four-order matrix M refers to a four-order transmission matrix which meets the incident conditions of the parallel beams that M11 is equal to 0, M22 is equal to 0, M33 is equal to 0 and M44 is equal to 0; and the front and rear subscripts of the previous matrix elements respectively refer to rows and columns at which the elements are positioned. With the adoption of the structure, point-to-point imaging is adopted, the matching beams are parallel beams, the defect that a point light source photographic image is fuzzy can be overcome, and the photographic resolution is improved.

Description

technical field [0001] The invention relates to the field of charged particle photography, in particular to a charged particle photography device in which matching beams are parallel beams. Background technique [0002] Charged particle photography is a perspective photography technique. Use the quasi-monoenergetic charged particle beam to pass through the sample to obtain an image, and then obtain the density, void and other information that needs attention inside the sample. [0003] Charged particle photography can have two forms, the first is direct perspective photography, and the second is perspective photography using electromagnetic lens focusing. Using a focusing lens can improve the resolution of the image. [0004] The focusing electromagnetic lens also has two forms, the first one is an axisymmetric structure, and the second one is a non-axisymmetric structure. The focusing effect of the axisymmetric structure electromagnetic lens is relatively weak, and only ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/04
Inventor 杨国君魏涛张卓李一丁张小丁江孝国石金水
Owner INST OF FLUID PHYSICS CHINA ACAD OF ENG PHYSICS
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