Planetary gear type two-sided lapping/polishing machine

Abstract

The invention discloses a planetary gear type two-sided lapping / polishing machine. A sun gear is fixed at the upper end of a sun gear driving shaft, and the middle of the sun gear driving shaft is supported by a mounting seat. A sun gear lifting mechanism comprises a first swivel nut, a second swivel nut, a supporting plate and multiple pull rods. The first swivel nut is loosely arranged outside the mounting seat in a sleeving mode and is supported by the mounting seat; internal threads of the second swivel nut and external threads of the first swivel nut are screwed together, and the first swivel nut is driven by a lifting driving mechanism. Multiple pull rod holes are formed in the lower portion of the mounting seat; the upper ends of the pull rods are fixed on the second swivel nut, and the lower ends of the pull rods penetrate through the pull rod holes and are fixed on the supporting plate. The supporting plate is mounted on the lower portion of the sun gear driving shaft. The height of the sun gear can be conveniently adjusted, and the adjusting process can be carried out anytime; parts do not need to be dismounted in the adjusting process, and equipment assembling precision cannot be changed so that stability of a machine tool in long-time work can be guaranteed; through the structure of the planetary gear type two-sided lapping / polishing machine, abrasion of the sun gear is even, and the service life of the sun gear is greatly prolonged.

Description

[technical field] [0001] The invention relates to a grinding machine or a polishing machine, in particular to a planetary gear type double-sided grinding / polishing machine. [Background technique] [0002] The double-sided grinding / polishing machine is very suitable for simultaneous grinding and polishing of the upper and lower parallel end faces of thin precision parts of hard and brittle materials. It can process thin parts with very high requirements for flatness, equal thickness and roughness, so It has been widely used in the processing fields of optics and semiconductor materials. [0003] Such as figure 1 and figure 2 As shown, the traditional double-sided grinding (polishing machine) adopts a planetary gear train transmission structure, including a frame, a sun gear 10, an inner ring gear 11, a lower grinding disc 12, an upper grinding disc 40, a planetary gear 41, and a sun gear driving mechanism , Drive mechanism of inner ring gear, drive mechanism of lower grin...

AI Technical Summary

Problems solved by technology

[0007] The wear of the meshing part of the sun gear and the inner ring gear of the double-sided grinding machine (polishing machine) has always been the main problem in the maintenance of the double-sided grinding machine equipment. The adjustment of the height of the sun gear and the inner ring gear is also labor-intensive and time-consuming maintenance operation, and It may also cause a decline in the yield of processed parts due to poor adjustment and assembly of the sun gear or ring gear

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