Liquid metal efficient cooling method and device for euv light source discharge electrode
A technology of liquid metal and discharge electrodes, which is applied to the components of gas discharge lamps, discharge lamps, discharge tubes, etc., can solve the problems of discharge electrode cooling, low cooling efficiency, and low space utilization, and achieve reduced volume and reduced Maintenance cost, effect of extending service life
Inactive Publication Date: 2017-06-23
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
[0004] In order to solve the shortcomings of low cooling efficiency and low space utilization of the existing water cooling, the present invention provides a liquid metal efficient cooling method and device for the discharge electrode of the EUV light source, which can effectively solve the problem of cooling the discharge electrode inside the light source
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[0019] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0020] Such as figure 2 As shown, the liquid metal high-efficiency cooling device for EUV light source discharge electrode includes electric fan 1, cladding pipe 2, heat insulation board 3, heat dissipation base 4, liquid metal 5 and electromagnetic pump 6, and the discharge of DPP-EUV light source The electrode is installed on the heat dissipation base 4; the cladding pipe 2 is installed in the heat dissipation base 4, and the inside of the cladding pipe 2 adopts a fully closed mode, and the cladding pipe 2 is connected to the liquid metal 5; the electromagnetic pump 6 is arranged at one end of the cladding pipe 2 , the circulating power of the liquid metal 5 is provided by the electromagnetic pump 6, and the heat shield 3 separates the heat dissipation base 4 from the electric fan 1, and the electric fan 1 performs strong convection heat dissipation on the...
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Abstract
The liquid metal high-efficiency cooling method and device for the discharge electrode of the EUV light source belong to the field of cooling high-temperature heating devices. In order to solve the problem that the entire set of water cooling devices in the prior art is large and will cause damage to the EUV light source, the discharge electrode of the EUV light source is installed. On the heat dissipation base, the cladding pipe is installed in the heat dissipation base, and the cladding pipe adopts a fully closed mode, and the cladding pipe is passed into liquid metal, and the heat shield separates the heat dissipation base from the electric fan; the electromagnetic pump is used to circulate the liquid metal through the electromagnetic field Flow drive; the electric fan performs strong convection heat dissipation on the liquid metal, and discharges the heat to the outside of the light source to complete the entire cooling process. This invention reduces the volume of the cooling system, reduces the mechanical vibration of the system, and prolongs the service life of the discharge electrode.
Description
technical field [0001] The invention belongs to the field of cooling of high-temperature heating devices, and in particular relates to a liquid metal efficient cooling method and device for EUV light source discharge electrodes. Background technique [0002] In the semiconductor industry, extreme ultraviolet lithography is considered to be the mainstream lithography technology for the 22-16nm node. The EUV light source is one of its important components. Among them, the DPP-EUV light source is one of the mainstream light sources in the 13.5nm band at this stage. The DPP-EUV light source uses discharge to make the Xe medium form plasma and radiate ultraviolet rays. The reflector reflects and purifies the energy spectrum multiple times to obtain EUV light in the 13.5nm band. The local temperature of the discharge electrode inside the light source can reach 2000-2500°C during operation. If the temperature accumulates, it will cause irreparable damage to the discharge electrode...
Claims
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IPC IPC(8): H01J7/26H01J61/04
CPCH01J7/26H01J61/04
Inventor 卢启鹏宋源龚学鹏王依
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI