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Micro-electromechanical device comprising a mobile mass that can move out-of-plane

A mobile mass, micro-electromechanical technology, applied in the field of micro-electromechanical systems, can solve problems such as damage and achieve high mechanical sensitivity

Inactive Publication Date: 2015-09-30
TRONICS MICROSYST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage introduced by this method is that the strain gauge is subjected to pressure along the y-axis, which can cause irreversible damage

Method used

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  • Micro-electromechanical device comprising a mobile mass that can move out-of-plane
  • Micro-electromechanical device comprising a mobile mass that can move out-of-plane
  • Micro-electromechanical device comprising a mobile mass that can move out-of-plane

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Embodiment Construction

[0065] A microelectromechanical device forming a force sensor with out-of-plane displacement, capable of increasing mechanical sensitivity, while protecting a strain gauge for measuring the displacement of a moving mass against a force sensor formed by the x- and y-axes will be described below Mechanical stress in the plane due to unwanted motion of the moving mass. For reference, displacement "out of plane" refers to displacement along the z-axis, while displacement "in plane" refers to displacement occurring within the plane defined by the x- and y-axes.

[0066] Such as figure 2 As shown, the present invention comprises at least one anchoring region 4 connected by a strain gauge 3 sensitive to pressure and tension and a torsional deformation element 10 connected to a moving mass, which can be divided into two parts: the first The part, or supporting structure, is formed by the outer frame 8 , and the second part, or main body of the moving mass, is formed by the lower bod...

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PUM

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Abstract

The invention relates to a micro-electromechanical device used as a force sensor, comprising a mobile mass connected to at least one securing zone by means of springs or deformable elements, and means for detecting the movement of the mobile mass, the mobile mass having an outer frame and an inner body, the outer frame and the inner body being connected by at least two flexible portions forming integral decoupling springs on two separate sides of the outer frame.

Description

technical field [0001] The present invention relates to a micro-electro-mechanical system, or MEMS, and more particularly to a micro-electro-mechanical structure of the force sensor type, wherein the deformable element forming the force sensor and the measuring instrument are protected from forces exerted on the force sensor. Damage caused by mechanical force. [0002] The invention finds particular application in, for example, accelerometers, gyroscopes, and magnetometers, or even pressure sensors, and more broadly any device that has a portion that can be displaced in response to a force to enable measurement of forces of various natures . Background technique [0003] Since the advent of precision etching and growth techniques, in particular, for applications in microelectronics, it has become possible to fabricate motors or sensors at the micro- and nano-scale. Such devices are of great interest in the field of sensors, but also in transmitters, actuators, or passive d...

Claims

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Application Information

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IPC IPC(8): B81B3/00G01P15/08G01P15/12G01P15/125
CPCG01P2015/0871B81B2203/0163B81B2203/0154G01P15/125G01P2015/0817G01P15/123G01P15/0802B81B2203/051B81B2203/058B81B2201/025B81B3/0051G01P15/18
Inventor 弗朗索瓦-格扎维埃·布瓦洛雷米·拉欧比纪尧姆·茹尔当
Owner TRONICS MICROSYST