Image identification device applied to semiconductor test device
A technology for image recognition and testing equipment, applied in optical components, optics, instruments, etc., can solve problems such as inability to flexibly transform, and achieve the effects of strong spatial adaptability, improved use efficiency, and flexible collocation
Inactive Publication Date: 2015-10-14
RAINTREE SCI INSTR SHANGHAI
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Problems solved by technology
[0003] The image recognition equipment in the prior art has many problems that need to be solved urgently. For example, the image recognition equipment in the current semiconductor testing equipment has only one lens, so generally it can only monitor a single point, that is, it can only monitor the image without moving the pattern. Observing pattern information for an area
In addition, the existing image recognition equipment also has certain space and position requirements for the installation and adjustment space of each lens and lens, which cannot be changed flexibly
Method used
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[0028] In the following detailed description of the preferred embodiment, reference is made to the accompanying drawings which form a part hereof. The accompanying drawings show, by way of example, specific embodiments in which the invention can be practiced. The illustrated embodiments are not intended to be exhaustive of all embodiments in accordance with the invention.
[0029] figure 1 shows an overall appearance diagram of an image recognition device disclosed in the present invention, figure 1 The dotted lines in are used to represent beams. The image recognition device mainly includes a detector 102 , a detector adjusting device 104 , a tube lens 106 , an illumination unit 108 , an optical path switching unit 110 , a beam splitting unit 112 , a prism unit 114 and a lens group 116 . Each part is designed in the form of modules, which can be independently adjusted, installed and disassembled, and the assembly is simple and easy to operate.
[0030] An image recognitio...
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The invention discloses an image identification device applied to a semiconductor test device. The image identification device comprises a tube mirror, an illumination assembly and a detector, and is characterized by further comprising a lens group which comprises at least two lenses; at least two light splitting assemblies which are connected at an upper position and a lower position and are used for refracting / reflecting illumination light beams from the illumination assembly to the lenses corresponding to the light splitting assemblies and obtaining images from the corresponding lenses; and an optical path switching assembly for opening or closing optical paths between the lenses and the light splitting assemblies so as to realize selection of the lenses, wherein among the light splitting assemblies, the light splitting assembly connected at the top layer is connected with the tube mirror, and the light splitting assemblies finally couple image light beams of the different lenses to the tube mirror, and formed images are received by the detector.
Description
technical field [0001] The present invention mainly relates to image recognition equipment, and in particular, relates to an image recognition equipment applied to semiconductor testing equipment. Background technique [0002] The device involved in the present invention is an image recognition device applied to semiconductor testing equipment. The device collects images of test objects and displays them on a computer, which is convenient for operators to quickly and correctly select test objects. We know that in semiconductor testing, the wafers and patterns tested and analyzed are at the micron or even nanometer level. The optical requirements for image recognition equipment must be accurate, fast, clear and high-resolution, so as to ensure the accuracy of recognition. and accuracy. At the same time, in addition to meeting the optical requirements, a set of excellent image recognition equipment should also be able to meet the space requirements of various test equipment, ...
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Login to View More IPC IPC(8): G02B27/10G02B27/00
Inventor 叶薇薇李宇
Owner RAINTREE SCI INSTR SHANGHAI