Plane joint type mechanical arm

Abstract

The invention relates to the field of mechanical arms, and in particular to a plane joint type mechanical arm. The plane joint type mechanical arm comprises a vacuum cavity formed by a sealing plate and a vacuum cover, an executing mechanism and a driving mechanism, wherein the executing mechanism is arranged in the vacuum cavity and on the sealing plate, and the driving mechanism is arranged outside the vacuum cavity. The executing mechanism comprises a first small arm, a second small arm, a third small arm and a fourth small arm which are connected in sequence, and further comprises an arm connecting base and a telescopic arm. One end of the telescopic arm is provided with a first clamp, the arm connecting base is connected with the first small arm and the third small arm, and the telescopic arm is fixed to the arm connecting base through a spring ejector pin close to the outer side of the arm connecting base. The driving mechanism is used for driving the second small arm and the fourth small arm to rotate to enable the telescopic arm to rotate, stretch out and draw back in the vacuum cavity. The plane joint type mechanical arm is large in conveying distance and high in efficiency.

Description

technical field [0001] The invention relates to the field of manipulators, in particular to a planar articulated manipulator. Background technique [0002] Vacuum manipulator is a manipulator that works in a vacuum environment and is mainly used in the semiconductor industry to transfer wafers in a vacuum chamber. With the development of semiconductor technology, the requirements for the vacuum degree of related equipment are getting higher and higher. Because depositing thin films under ultra-high vacuum conditions can reduce the residue and influence of residual gas, and reduce impurities and defects on the surface and interface. [0003] According to different transmission methods, vacuum manipulators can be divided into planar joint manipulators and radial linear motion (R-θ) manipulators. Because the planar articulated manipulator can achieve multiple degrees of freedom and the movement is relatively flexible, the planar articulated manipulator is widely used. [000...

AI Technical Summary

Problems solved by technology

Although foreign planar joint vacuum manipulators can achieve a vacuum degree of 10 -8 However, there are the following disadvantages: the transmission distance is smaller than the diameter of the cavity; the transmission distance of the linear manipulator can be greater than a radius, but they are all in single-head mode, and only one type of sample can be transmitted, and the product output rate Low

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