Plane joint type mechanical arm

A technology of planar joints and manipulators, applied in the field of manipulators, can solve problems such as low product output rate and small transmission distance, and achieve the effect of improving the flexibility of use and improving the efficiency of film transfer

Active Publication Date: 2015-11-04
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although foreign planar joint vacuum manipulators can achieve a vacuum degree of 10 -8 However, there are the following disadvantages: the transmission distance is smaller than the diameter of the cavit

Method used

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Embodiment Construction

[0024] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0025] The object of the present invention is to provide a planar articulated manipulator with large transmission distance and high efficiency in view of the deficiencies in the prior art.

[0026] see Figure 1 to Figure 2 , the planar articulated manipulator provided by the embodiment of the present invention, which includes:

[0027] A vacuum chamber 1 composed of a sealing plate and a vacuum cover, an actuator 2 placed on the sealing plate inside the vacuum chamber 1, and a driving mechanism 3 outside the vacuum chamber 1;

[0028] In the embodiment of the present invention, the sealing plate can use a welded bellows to achieve vacuum sealing, but it is not limited t...

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Abstract

The invention relates to the field of mechanical arms, and in particular to a plane joint type mechanical arm. The plane joint type mechanical arm comprises a vacuum cavity formed by a sealing plate and a vacuum cover, an executing mechanism and a driving mechanism, wherein the executing mechanism is arranged in the vacuum cavity and on the sealing plate, and the driving mechanism is arranged outside the vacuum cavity. The executing mechanism comprises a first small arm, a second small arm, a third small arm and a fourth small arm which are connected in sequence, and further comprises an arm connecting base and a telescopic arm. One end of the telescopic arm is provided with a first clamp, the arm connecting base is connected with the first small arm and the third small arm, and the telescopic arm is fixed to the arm connecting base through a spring ejector pin close to the outer side of the arm connecting base. The driving mechanism is used for driving the second small arm and the fourth small arm to rotate to enable the telescopic arm to rotate, stretch out and draw back in the vacuum cavity. The plane joint type mechanical arm is large in conveying distance and high in efficiency.

Description

technical field [0001] The invention relates to the field of manipulators, in particular to a planar articulated manipulator. Background technique [0002] Vacuum manipulator is a manipulator that works in a vacuum environment and is mainly used in the semiconductor industry to transfer wafers in a vacuum chamber. With the development of semiconductor technology, the requirements for the vacuum degree of related equipment are getting higher and higher. Because depositing thin films under ultra-high vacuum conditions can reduce the residue and influence of residual gas, and reduce impurities and defects on the surface and interface. [0003] According to different transmission methods, vacuum manipulators can be divided into planar joint manipulators and radial linear motion (R-θ) manipulators. Because the planar articulated manipulator can achieve multiple degrees of freedom and the movement is relatively flexible, the planar articulated manipulator is widely used. [000...

Claims

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Application Information

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IPC IPC(8): B25J9/08B25J18/02H01L21/677
Inventor 杨辉张宝顺吴燕华
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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