Plane joint manipulator

Abstract

The invention relates to the field of manipulators, in particular to a planar articulated manipulator. It includes: a vacuum chamber composed of a sealing plate and a vacuum cover, an actuator inside the vacuum chamber placed on the sealing plate, and a driving mechanism outside the vacuum chamber; the actuator includes first forearms connected in sequence , the second forearm, the third forearm and the fourth forearm, and also includes an arm connecting base and a telescopic arm with a first clamp installed at one end, the arm connecting base is connected with the first and third forearms, telescopic The arm is fixed on the arm connection base through a spring thimble installed near the outside of the arm connection base; the driving mechanism is used to rotate the telescopic arm in the vacuum cavity by driving the rotation of the second small arm and the fourth small arm , telescopic. The planar articulated manipulator provided by the invention has large transmission distance and high efficiency.

Description

technical field [0001] The invention relates to the field of manipulators, in particular to a plane joint type manipulator. Background technique [0002] A vacuum manipulator is a manipulator that works in a vacuum environment and is mainly used in the semiconductor industry to realize the transfer of wafers in a vacuum chamber. With the development of semiconductor technology, the requirements for vacuum degree of related equipment are getting higher and higher. Because the deposition of thin films under ultra-high vacuum conditions can reduce the residue and influence of residual gases, impurities and defects at the surface and interface are reduced. [0003] According to different transmission modes, vacuum manipulators can be divided into plane joint manipulators and radial linear motion (R-θ) manipulators. Because the plane joint manipulator can achieve multiple degrees of freedom and the movements are more flexible, the plane joint manipulator is widely used. [000...

AI Technical Summary

Problems solved by technology

Although foreign planar joint vacuum manipulators can achieve a vacuum degree of 10 -8 However, there are the following disadvantages: the transmission distance is smaller than the diameter of the cavity; the transmission distance of the linear manipulator can be greater than a radius, but they are all in single-head mode, and only one type of sample can be transmitted, and the product output rate Low

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