Miniature three-degree-of-freedom open airflow gyroscope

Abstract

The invention relates to a miniaturized three degree-of-freedom opening airflow top, comprising a three degree-of-freedom angle speed sensing element and a PCB (printed circuit board) electrically connected with the three degree-of-freedom angle speed sensing element; the three degree-of-freedom angle speed sensing element comprises an upper cover plate, an upper silicon plate, a lower silicon plate and a bottom plate, an opening airflow network structure is formed by platelike sensing element structure, the airflow network comprises a pump cavity under a piezoelectric ceramic vibrator, an inlet sensing chamber and an outlet sensing chamber; the cross section area of flow guide holes of the upper silicon plate is larger than that of an opening of the pump cavity but smaller than that of a flow converging opening; a piezoelectric pump driving circuit on the PCB provides excitation voltage for the piezoelectric ceramic vibrator on the upper cover plate, and three pairs of parallel hot wires on the lower silicon plate respectively serve as two arms of three Wheatstone bridges of the PCB. The sensitivity of the airflow top is improved and size and power consumption are greatly reduced.

Description

technical field [0001] The invention belongs to the technical field of measuring the angular velocity and attitude of a moving body by using the principle of Coriolis force, in particular to the technical field of micro airflow gyroscopes produced by combining high-precision numerical control machine tools and micro-mechanical techniques. It is used for the collection and control of attitude information of micro-carriers such as automobile safety, intelligent robots, drones, Internet of Things, wearable devices, helmets, cameras, etc. It can also be used for stability and control of oil drilling platforms, construction, industrial automation, etc. Control System. Background technique [0002] In the prior art, micro-gyroscopes represented by micro-mechanical vibrating gyroscopes generally have vibrating beams and suspension devices in their sensitive components. When large impacts or strong vibrations occur, they will be damaged due to excessive inertial force, so the impact...

AI Technical Summary

Problems solved by technology

This kind of jet gyroscope is first made by traditional mechanical processing technology, which is bulky and cannot be used in the field of micro-carrier attitude measurement and control, thus restricting its application and development; in addition, the hot wire in the thermal element is manually welded, which is difficult Mass production, poor consistency, and high cost; again, it can only be sensitive to angular velocity in one direction, such as forming a multi-degree-of-freedom angular velocity measurement requires combined installation, and the error caused by the installation distance is large

[0003] In the prior art, the MEMS process is generally used to etch the gas flow network in a silicon chip. Since the thickness of the silicon chip is only about 500 μm, the size of the gas flow network is small, the gas capacity is small, and the inertia it receives is small at the same angular velocity input. , the deflection of the airflow beam is small, and the sensitivity of the gyro is very small

In addition, due to the la

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