Quantitative determination method for twin image dimension in final optics damage on-line inspection
A quantitative detection method and technology of optical components, applied in the direction of optical instrument testing, measuring devices, testing of machine/structural components, etc., to achieve the effect of precise quantitative detection
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specific Embodiment approach 1
[0017] Specific embodiment 1: The method for quantitatively detecting the size of twin images in the on-line detection of terminal optical element damage in this embodiment includes the following steps:
[0018] Step 1: Obtain the o-ray image and e-ray image of the damage point in the imaging system of M×N (M and N reach the damage point as the number of collected samples) on the optical element through the crystal birefringence effect in the terminal optical element online detection system Analyze and find out the position relationship and energy relationship satisfied by the M×N pair of twin coordinates;
[0019] Step 2: According to the coordinate position relationship between the o-ray image and the e-ray image, the e-ray image is used as a double image, the gray integral value of the e-ray image is combined with the o-ray image, and the o-ray image after the combined energy is retained as the damage point The only image of, remove the e-light image;
[0020] Step 3: For the FOD...
specific Embodiment approach 2
[0024] Second embodiment: This embodiment is different from the first embodiment, and it is characterized in that in step one, on the terminal optical element online detection system FODI, the terminal optical element crystal birefringence effect and the geometric optical imaging formula are used to obtain the M on the optical element. ×The coordinate positions of the o-ray image and e-ray image of N damage points in the imaging system:
[0025] Find the position Q of the o ray according to the crystal birefringence effect of the terminal optical element 1 (x 1 ,y 1 ):
[0026] f ( θ 1 ) = ( D 1 + D 2 ) tanθ 1 + L 2 t a n [ a r c s i n ( n 1 sinθ 1 / n o ) ] - x 2 + y 2 - - - ( 16 )
[0027] x 1 = x x 2 + y 2 D 3 tanθ 1 m y 1 = y x 2 + y 2 D 3 tanθ 1 ...
specific Embodiment approach 3
[0033] Specific embodiment three: this embodiment is different from the specific embodiment two, and is characterized in that formulas (16)-(19) are obtained by the following formula:
[0034] A. Find the ordinary light wave vector k o And very light wave vector k e The expression:
[0035] The thickness of the uniaxial crystal is L and the aperture is a×b. A coordinate system is established on the crystal surface, and a beam of parallel light is along the direction k 1 =(cosα 1 ,cosβ 1 ,cosθ 1 ) Illuminate the crystal surface, the incident point is the origin of the coordinate O, the z-axis is the normal of the crystal surface; the cosine of the direction of the crystal optical axis p is e p =(x 0 ,y 0 ,z 0 ), in the crystal, produce refracted o light and e light; ordinary light o light wave vector k o , Extraordinary light (e light) wave vector k e , Extraordinary light (e light) light vector s e The angle with the z axis is θ o , Θ ke , Θ se , Which gives k o , K e The expressio...
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