Low-volatility monocrystalline silicon slice texturing solution and preparation method thereof
A single-crystal silicon wafer, low-volatility technology, applied in chemical instruments and methods, crystal growth, post-processing details, etc., can solve the problems of adverse effects of texturing effect, easy volatilization of IPA, and difficulty in controlling the amount of supplementation. Achieve good cleaning and decontamination effect, improve product quality, and achieve the effect of many times of repeated use
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[0015] Non-limiting examples of the present invention are as follows:
[0016] A kind of low-volatility monocrystalline silicon wafer texturizing liquid, is prepared from the component raw material of following weight (kg):
[0017] Sodium hydroxide 0.5, additive 3, sodium gluconate 0.2, raffinose 0.5, sodium citrate 0.3, polyvinylpyrrolidone 0.3, cocamidopropyl betaine 0.5, propylene glycol alginate 0.3, simethicone 0.1, water 80;
[0018] Among them, the auxiliary agent is made of the following raw materials by weight (kg): saponin 10, nano-titanium dioxide 0.1, ammonium persulfate 0.1, vinyl acetate 1, sodium bicarbonate 0.2, dodecyl glucoside 1, water 100; The preparation method of the agent is to grind the saponins into powder, add the obtained saponins powder, sodium bicarbonate and lauryl glucoside into water at 80°C and 200r / min and stir for 4h, filter after cooling, and add acetic acid to the filtrate Vinyl ester and nano-titanium dioxide were dispersed ultrasonical...
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