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A mems three-axis accelerometer

An axis acceleration and X-axis technology, applied in the field of three-axis accelerometers, can solve problems such as the inability to completely eliminate external interference.

Active Publication Date: 2018-11-30
GOERTEK MICROELECTRONICS CO LTD
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  • Abstract
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Problems solved by technology

However, due to the limitation of its Z-axis structure principle, most MEMS three-axis accelerometers adopt an eccentric design in a certain direction to complete the simultaneous detection of three axial accelerations through a single structure
Such a structural design, on the one hand, has special requirements on the process, on the other hand, the asymmetrical eccentric design makes it impossible to completely eliminate external interference

Method used

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  • A mems three-axis accelerometer
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  • A mems three-axis accelerometer

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Embodiment Construction

[0027] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that the relative arrangements of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise.

[0028] The following description of at least one exemplary embodiment is merely illustrative in nature and in no way taken as limiting the invention, its application or uses.

[0029] Techniques, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such techniques, methods and devices should be considered part of the description.

[0030] In all examples shown and discussed herein, any specific values ​​should be construed as exemplary only, and not as limitations. Therefore, other instances of the exemplary embodiment may have dif...

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Abstract

The invention discloses an MEMS triaxial accelerometer. An anchoring part is located in a structural center of a mass block, and the central line of an elastic twisted beam in the length direction is coincided with the central line of the mass block. The weights of parts, located at two sides of the elastic twisted beam, of the mass block are not equal. The triaxial accelerometer also comprises an X-axis detection capacitor structure for detecting an X-axis acceleration signal, a Y-axis detection capacitor structure for detecting a Y-axis acceleration signal, and a Z-axis detection capacitor structure for detecting a Z-axis acceleration signal. The triaxial accelerometer enables X-axis, Y-axis and Z-axis acceleration detection structures to be integrated into one structure, and the structural center is an anchoring point of the movable mass block. The mass block is connected to the anchoring point through the elastic twisted beam, and is enabled to move in each direction along with the input of acceleration, thereby achieving the detection of the acceleration signal in each direction.

Description

technical field [0001] The invention belongs to the field of micro-electro-mechanical (MEMS), more precisely, relates to a micro-electro-mechanical accelerometer, in particular to a three-axis accelerometer. Background technique [0002] At present, with the development of consumer electronics and wearable devices, higher and higher requirements are put forward for the performance of MEMS inertial sensors. Many system manufacturers hope that MEMS inertial devices can further reduce the chip size on the basis of maintaining the existing performance. Therefore, the existing MEMS three-axis accelerometers all tend to be designed with three-axis integration. However, due to the limitations of its Z-axis structure principle, most MEMS three-axis accelerometers adopt an eccentric design in a certain direction to complete the simultaneous detection of three axial accelerations through a single structure. Such a structural design, on the one hand, has special requirements on the pr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/18G01P15/125
Inventor 郑国光
Owner GOERTEK MICROELECTRONICS CO LTD
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