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Low temperature co-fired ceramic material and preparation method thereof

A low-temperature co-fired ceramic and ceramic technology, which is applied to low-temperature co-fired ceramic materials and their preparation, low-temperature co-fired ceramic materials with low dielectric loss for high frequency and their preparation fields, can solve the problem of poor device stability, narrow process window, and properties. Large changes, etc., to achieve the effects of excellent dielectric properties, good high-frequency performance, and low dielectric loss

Active Publication Date: 2017-11-21
NAT UNIV OF DEFENSE TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The glass-ceramic system LTCC material needs to go through the process of nucleation and crystallization, but this process is difficult to completely control, and with the change of heat treatment conditions, its properties change greatly, especially the dielectric loss
Therefore, the main disadvantages of this system are narrow process window, low yield, and poor device stability.

Method used

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  • Low temperature co-fired ceramic material and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] A kind of low-temperature co-fired ceramic material of the present invention, this low-temperature co-fired ceramic material is made of La 2 o 3 -B 2 o 3 -Al 2 o 3 Glass-ceramic and Al 2 o 3 Ceramic filling phase composition, wherein, by mass fraction, the La 2 o 3 -B 2 o 3 -Al 2 o 3 glass-ceramic is 60wt%, the Al 2 o 3 The ceramic filling phase is 40 wt%.

[0034] In this example, La 2 o 3 -B 2 o 3 -Al 2 o 3 The mass fraction of each component in the glass-ceramic is: La 2 o 3 20wt%, B 2 o 3 60wt%, Al 2 o 3 is 20wt%.

[0035] In this embodiment, the dielectric constant of the low temperature co-fired ceramic material is 7.85, and the dielectric loss is 4.21×10 -3 , the frequency is 8.65GHz.

[0036] A preparation method of the above-mentioned low temperature co-fired ceramic material of the present embodiment, comprising the following steps:

[0037] (1)La 2 o 3 -B 2 o 3 -Al 2 o 3 Preparation of glass-ceramic powder: 20wt% lanthanum o...

Embodiment 2

[0043] A low temperature co-fired ceramic material of the present invention, comprising 50wt% La 2 o 3 -B 2 o 3 -Al 2 o 3 Glass-ceramic and 50wt% Al 2 o 3 Ceramic filler phase.

[0044] In this example, La 2 o 3 -B 2 o 3 -Al 2 o 3 The mass fraction of each component in the glass-ceramic is: La 2 o 3 22.5wt%, B 2 o 3 67.5wt%, Al 2 o 3 is 10wt%.

[0045] In this embodiment, the dielectric constant of the low temperature co-fired ceramic material is 7.69, and the dielectric loss is 3.24×10 -3 , the frequency is 8.84GHz.

[0046] Concrete operation steps and process parameter of embodiment 2 are basically the same as embodiment 1, and difference is:

[0047] The heat preservation melting temperature in the step (1) is 1200°C.

[0048] The sintering temperature in step (5) is 900°C.

Embodiment 3

[0050] A low temperature co-fired ceramic material of the present invention, comprising 60wt% La 2 o 3 -B 2 o 3 -Al 2 o 3 Glass-ceramic and 40wt% Al 2 o 3 Ceramic filler phase.

[0051] In this example, La 2 o 3 -B 2 o 3 -Al 2 o 3 The mass fraction of each component in the glass-ceramic is: La 2 o 3 22.5wt%, B 2 o 3 65wt%, Al 2 o 3 It is 12.5wt%.

[0052] In this embodiment, the dielectric constant of the low temperature co-fired ceramic material is 7.54, and the dielectric loss is 3.68×10 -3 , the frequency is 8.51GHz.

[0053] Concrete operation steps and process parameter of embodiment 3 are substantially the same as embodiment 1, and difference is:

[0054]The heat preservation melting temperature in the step (1) is 1250°C.

[0055] The sintering temperature in step (5) is 900° C., and the holding time is 1 h.

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Abstract

The invention discloses a low-temperature co-fired ceramic material and a preparation method thereof. The low-temperature co-fired ceramic material is composed of La2O3-B2O3-Al2O3 glass-ceramics and Al2O3 ceramic filling phases. In terms of mass fraction, the La2O3-B2O3-Al2O3 glass-ceramics is 40wt% to 60wt%, and the Al2O3 ceramic filling phase is 40wt%. ~60wt%. The preparation method comprises preparation of La2O3-B2O3-Al2O3 glass-ceramic powder, pretreatment of Al2O3 ceramic powder, preparation of composite powder, molding and low-temperature sintering of composite powder. The low-temperature co-fired ceramic material of the present invention has the advantages of wide process window, low dielectric loss, can be used in high-frequency field, etc., the preparation method is simple and convenient, and the investment in equipment is small.

Description

technical field [0001] The invention belongs to the field of electronic ceramics and its preparation, and relates to a low-temperature co-fired ceramic material and a preparation method thereof, in particular to a high-frequency low-dielectric-loss low-temperature co-fired ceramic material and a preparation method thereof. Background technique [0002] LTCC (Low Temperature Cofired Ceramics, that is, low temperature co-fired ceramics) technology refers to the mixing and casting of ceramic powder and organic binder into a green tape (Green Tape) with precise thickness and density, and laser drilling is used on the green tape , microporous grouting, precision conductor printing and other processes to produce the required circuit patterns, and embed multiple passive components in it, then laminate and sinter (sintering temperature is lower than 900°C) to make built-in passive components, A new high-density electronic packaging technology with a three-dimensional circuit structu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03C14/00C04B35/10C04B35/622
Inventor 张为军陈兴宇白书欣刘卓峰
Owner NAT UNIV OF DEFENSE TECH