Flow rate control valve for flow rate control device
A technology of flow control device and flow control valve, which is applied in the direction of valve device, valve operation/release device, diaphragm valve, etc.
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[0100] figure 1 and even Figure 8 It is a figure showing the first embodiment of the present invention, figure 1 It is a longitudinal sectional view of the normally closed piezoelectric element-driven metal diaphragm control valve according to the first embodiment of the present invention, figure 2 for figure 1 The II-II section outline diagram.
[0101] The control valve is composed of the following components: a valve main body 1 provided with a valve chamber hole 1a; a metal diaphragm valve body 2 arranged opposite to a valve seat 6 formed on the bottom surface of the valve chamber hole 1a; Insert the lower support cylinder 22 of the piezoelectric element 10 above the metal diaphragm valve body 2 of the hole 1a; insert the lower support cylinder 22 in the horizontal direction and fix it on the support stand 16 of the valve main body 1; insert it into the support The disc spring bearing platform 8 and the disc spring 18 between the platform 16 and the bottom wall 21...
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