Fixing base table and evaporating device

Abstract

The invention discloses a fixing base table and an evaporating device. The fixing base table is used for fixing a base plate to be processed in the evaporating process of the base plate to be processed. At least one groove channel is formed in one side, facing the base plate to be processed, of the fixing base table. At least one deformation measuring unit is arranged in each groove channel. The deformation measuring units are used for measuring the deformation of the areas, corresponding to the deformation measuring units, on the base plate to be processed in the evaporating process. According to the technical scheme, the groove channels are formed in the side, facing the base plate to be processed, of the fixing base table, meanwhile, the corresponding deformation measuring units are arranged in the groove channels, and therefore the deformation of the base plate to be processed is measured on the premise that the evaporating process is not influenced.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a fixed base and evaporation equipment. Background technique [0002] In the field of organic light-emitting diode (Organic Light-Emitting Diode, referred to as OLED) display product production, it is a relatively mature method to produce OLED products by evaporation. [0003] When using the evaporation method to make OLED display products, it is necessary to set some double-sided adhesive tape on the peripheral area of ​​the substrate to be processed, and then use the double-sided tape to fix the substrate to be processed under the fixed base, and then place the substrate to be processed away from the fixed base. Set the corresponding metal mask on one side of the table, and finally move the above-mentioned fixed base, the substrate to be processed and the metal mask to the top of the evaporation tank to evaporate the the corresponding film. [0004] However, since the substr...

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Problems solved by technology

Among them, when the substrate to be processed is deformed, the evaporated pattern may be shifted from the predetermined position, resulting in the final product being a defective product

More importantly, when the deformation of the substrate to be processed is too large, it will lead to the phenomenon of debris on the substrate to be processed

[0005] At present, there is no method in this field that can effectively reduce the deformation of the substrate to be processed during the evaporation process. The reason is that, since the environment of the entire evaporation process is a closed environment, the operator cannot obtain real-time The deformation data of the substrate during the evaporation process, so there is no corresponding support data for research

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