Probe machining equipment

Abstract

The invention discloses probe machining equipment. The probe machining equipment comprises a controller, a control circuit, a mechanical device and a corrosive liquid device, wherein the controller is connected with the mechanical device; the corrosive liquid device comprises an electrode and corrosive liquid; the mechanical device is used for fixing a probe to be machined and drives the probe to be machined to move; the control circuit comprises a preparation corrosive circuit, a preparation stopping circuit and a judgment circuit; the preparation corrosive circuit is used for outputting corrosive voltage to the electrode; the preparation stopping circuit collects a current change signal of the preparation corrosive circuit; the judgment circuit is used for detecting whether the probe is immersed in the corrosive liquid or not. According to the probe machining equipment, the structure and connection mode of the control circuit are improved, and other components of the mechanical device and the like are matched, so that important parameters like corrosive voltage, probe immersing depth and probe lifting speed in the probe corrosion process are accurately controlled, and the nano probe high in precision, resistant to abrasion, recyclable and low in cost can be obtained through machining.

Description

technical field [0001] The invention belongs to the technical field of testing, and more specifically relates to a probe processing equipment. Background technique [0002] At present, precision technology is developing rapidly and has a huge impact on current scientific and technological research, social production, and daily life. Probes are widely used in precision technology fields, such as scanning tunneling microscopes, semiconductor measuring instruments, nanomanipulator arms, etc. The preparation methods of precision probes commonly used in the prior art include ultra-vacuum ion field microscopy, grinding, shearing, field-induced (electrostatic) emission, electrochemical corrosion, and the like. Among them, the electrochemical corrosion method has gained more and more favor due to its good preparation reproducibility, low cost, and simple structure. [0003] Although the electrochemical corrosion method has the above-mentioned advantages, the electrochemical corros...

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Problems solved by technology

[0003] Although the electrochemical corrosion method has the above-mentioned advantages, the electrochemical corrosion method and its corresponding equipment in the prior art are generally controlled manually, and the probe is often processed according to the experience of the operator. The stability is poor, and the surface morphology of the probe is poor. Unevenness, it is difficult to process the probe with high precision, which affects the surface quality of the probe, and the obtained probe can only be used in occasions where the precision of the probe is not high

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