Deformable mirror device capable of generating a plurality of aberrations

Abstract

The invention discloses a deformable mirror device capable of generating a plurality of aberrations, and belongs to the field of aberration compensation of an optical system. The problems that loading of axial force, tangential moment, and radial moment at the same time only through loading force on an extension piece cannot realized in the prior art, and precision of effective aberration and an error of rigid body displacement are hard to control. According to the device, a mirror frame between an optical component and a deformable mirror frame is formed through adhesion or tight pressing. A plurality of actuators are fixed on an external ring of the deformable mirror frame, respectively, and input force is applied to actuating arms of the deformable mirror frame. The deformable mirror frame is of an integrated structure formed by connecting the external ring of the mirror frame and an interior ring of the mirror frame through a plurality of circumferentially-distributed flexible blocks, and one actuating arm is distributed between every two flexible blocks. The actuating arms are connected to the interior ring of the mirror frame, and are separated from the external ring of the mirror frame by a slit from linear cutting. A cross section of each actuating arm is a cross-shaped beam, and the eight actuators are acted on upper and lower sides of four ends of the cross-shaped beam, respectively.

Description

technical field [0001] The invention relates to a deformable mirror device capable of producing multiple aberrations in optical elements, belonging to the field of system aberration compensation of optical systems, in particular to system aberration compensation in lithography projection objective lens systems. Background technique [0002] When the projection objective lens system works under normal lighting, ring lighting, dipole lighting, quadrupole lighting and other working conditions, the thermal load will cause the wave aberration of the system to deteriorate, resulting in Z5, Z6, Z7, Z8, Z12, Components such as Z13, Z17, Z18, Z28, Z29 become larger, so they need to be compensated. [0003] U.S. Patent US6388823B1 discloses a Z5 astigmatic deformable mirror device, which includes optical elements, a deformable support ring, a frame, and a pneumatic bellows driver. Tongues are distributed outside the deformable support ring, and the deformable support ring and the fram...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problems existing in the existing patents that the simultaneous loading of axial force, tangential moment, and radial moment cannot be realized only by loading force on the extension, and it is difficult to control the accuracy of effective aberration and the displacement error of rigid body, A new type of deformable mirror device capable of generating multiple aberrations is proposed

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