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Voice coil motor possessing gravity compensation function

A voice coil motor, gravity compensation technology, applied in electrical components, electromechanical devices, etc., can solve the problems of increasing motor heating, no load gravity compensation function, etc., and achieve the effect of extending service life, conducive to heat dissipation, and small size

Active Publication Date: 2016-01-27
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Voice coil motor in the prior art, please refer to Figure 1 to Figure 3 , the structure that the coil 2 is independent of the magnet 3 and the back iron 1a, 1b is mostly used, and when the motor exerts force vertically, the motor has no gravity compensation function for the load, which increases the heat generation of the motor to a certain extent

Method used

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  • Voice coil motor possessing gravity compensation function
  • Voice coil motor possessing gravity compensation function
  • Voice coil motor possessing gravity compensation function

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0110] Please refer to Figure 4 to Figure 7 , the voice coil motor with gravity compensation function provided by the present invention includes: an external back iron, the external back iron is a cylindrical back iron or is composed of two plate-shaped back irons, and a cylindrical back iron 110 is used in this embodiment The magnetic steel assembly 130 placed in the cylindrical back iron 110; and the coil placed between the inner side of the cylindrical back iron 110 and the outer side of the magnetic steel assembly 130, the coil and the magnetic steel assembly 130 can move relative to each other. Specifically, the coils can be in one group or two groups. When the coils are in one group, the corresponding magnetic steel assembly includes a center back iron, a cylindrical shape sleeved on the center back iron Magnet, the position of the coil corresponds to the position of the cylindrical magnet; in this embodiment, the coils are two groups, and the two groups of coils are no...

Embodiment 2

[0123] Embodiment 2 preferably, please refer to Figure 11 The difference between this embodiment and Embodiment 1 is that: the center back iron 231 is provided with a cylindrical hole 241 that runs through the entire center back iron 231 along the axial direction of the voice coil motor, and the cylindrical hole 241 can be easily penetrated into Horizontal (x, y) limit guide posts, of course, the limit guide posts must be non-magnetic materials. Please focus on reference Figure 12 , adding the cylindrical hole 241 in the center back iron 231 will not block the magnetic circuit and still achieve the effect of gravity compensation.

Embodiment 3

[0125] Preferably, please refer to Figure 13 The difference between this embodiment and Embodiment 1 is that the magnetic steel assembly 330 includes a central magnet 331, two first back irons 332a, 332b, and two cylindrical magnets 333a, 333b with opposite magnetization directions. A first back iron 332a, 332b is fixedly connected to both ends of the center magnet 331, and the two cylindrical magnets 333a, 333b are sleeved on the outer sides of the two first back irons 332a, 332b respectively. The magnet 331, the two first back irons 332a, 332b and the two cylindrical magnets 333a, 333b are fixedly connected to each other to form a whole. Specifically, the positions of the two cylindrical magnets 333a, 333b correspond to the positions of the two sets of coils 320a, 320b one by one.

[0126] Please focus on reference Figure 14 , the thick arrow 340 in the figure represents the magnetization direction of the magnet, and the thin arrow 350 represents the direction of the mag...

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PUM

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Abstract

The invention relates to a voice coil motor possessing a gravity compensation function. The motor comprises external back iron, a magnetic steel assembly and a coil. The external back iron is cylindrical back iron or two pieces of plate-shaped back iron. The magnetic steel assembly is arranged in the external back iron. The coil is arranged between an inner side of the external back iron and an outer side of the magnetic steel assembly. The coil and the magnetic steel assembly can carry out relative movement. A magnetic flux saturation degree of the external back iron changes from being small to being large along a gravity direction. Through setting the external back iron whose magnetic flux saturation degree changes from being small to being large along the gravity direction, a motor possesses a relatively stable upward force which is taken as gravity compensation so that motor heat is reduced.

Description

technical field [0001] The invention relates to a voice coil motor with gravity compensation function. Background technique [0002] Because of its simple structure, small size, high response speed, and high precision, voice coil motors are widely used in short-stroke micro-motion units in lithography machines. [0003] Voice coil motor in the prior art, please refer to Figure 1 to Figure 3 , the structure that the coil 2 is independent of the magnet 3 and the back iron 1a, 1b is mostly used, and when the motor exerts force vertically, the motor has no gravity compensation function for the load, which increases the heat generation of the motor to a certain extent. [0004] figure 1 It is a three-dimensional structure of a traditional voice coil motor, and its cross-section is shown in figure 2 As shown, its electromagnetic structure includes: a magnet 3, back irons 1a and 1b (which are magnetically permeable materials) fixedly connected with the magnet 3, and a coil 2 b...

Claims

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Application Information

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IPC IPC(8): H02K33/18
Inventor 段素丙陈庆生刘小虎季汉川胡兵张霖
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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