Production system
A production system and product technology, applied in the general control system, control/regulation system, comprehensive factory control, etc., can solve the problem of complex change operation and achieve the effect of easy change operation
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[0032] Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0033] (Structure of production system)
[0034] figure 1 It is a block diagram for explaining the schematic structure of the production system 1 which concerns on embodiment of this invention. figure 2 For description stored in figure 1 A diagram of the correspondence table T of the programmable logic controller 12 shown.
[0035] The production system 1 of the present embodiment is a system for producing various products by performing predetermined processing on objects to be processed. Specifically, the production system 1 of this embodiment is a system for performing predetermined processing on a substrate 2 as an object to be processed to produce various types of semiconductors as products. The production system 1 has: a bracket 3 for storing a plurality of substrates 2; a plurality of processing devices 4 to 7 for performing prescribed processing on the subst...
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