Metal surface roughness detection device and method based on reflection-type terahertz time-domain spectroscopy

Abstract

The invention discloses a metal surface roughness detection device based on the reflection-type terahertz time-domain spectroscopy. The device comprises a femtosecond laser (1), a beam splitter (2), an optical delay line (3), a reflecting mirror (4), a first optical fiber coupler (5), a first optical fiber (6-1), a second optical fiber (6-2), a terahertz transmitter (7), a sample table (8), a terahertz detector (9), a second optical fiber coupler (10) and a computer (11). The invention further discloses a detection method utilizing the device. The method comprises the steps of firstly, utilizing the device for obtaining the terahertz reflection spectrum of a standard test piece of a certain material, building a roughness detection model, then measuring the terahertz reflection spectrum of the piece to be tested, and applying the built roughness detection model for obtaining the roughness. On the basis of the terahertz wave principle, the surface roughness difference, corrosion, surface damage of metal with a cladding layer can be accurately detected, and the device and method have the advantages of being free of damage, contactless, rapid in analysis speed and the like.

Description

technical field [0001] The invention relates to a metal surface roughness detection device and a detection method, in particular to a metal surface roughness detection device and method based on reflective terahertz time-domain spectroscopy, belonging to the field of terahertz technology applications. Background technique [0002] The surface roughness of metal refers to the relatively irregular flatness of the metal surface, which is caused by the process in machining, mechanical damage or corrosion during service. Generally, in mechanical processing, machinists use their fingers to feel the difference between the workpiece and the standard smooth test piece to evaluate the roughness of the metal surface. This method is relatively subjective, and different people may have different judgments on the same workpiece. [0003] In addition, there is another detection method that uses the probe method. This method uses a displacement sensor to evaluate the roughness value, which ...

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Problems solved by technology

[0012] Aiming at the problems existing in the above-mentioned prior art, the present invention provides a metal surface roughness detection device and method based on reflection-type terahertz time-domain spectroscopy, which can solve the problems of strong subjectivity, low accuracy and bandiness in current metal surface roughness detection. Problems such as difficult detection of metal roughness with coating

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