Gas purge device and gas purge method

Abstract

The present invention relates to a gas purge device and a gas purge method. The gas purge device prevents a gas introduction part of an elastic body from being damaged upon contact with a nozzle, and furthermore prevents the gas introduction part and the nozzle from adhering to each other. A container is positioned, and a purge gas is introduced from the nozzle into the gas introduction part provided in a bottom part of the container, the bottom face being round and having a gas introduction hole at the center, the gas introduction part comprising an elastic body. The nozzle is provided with a tip surface being at least as large as the bottom face of the gas introduction part and having a planar shape, and a nozzle hole positioned at the center of the tip surface and being at least as small as the gas introduction hole of the container, the tip surface being roughened or being configured from a low-friction material, the tip surface and the gas introduction part being slidable.

Description

technical field [0001] The present invention relates to gas cleaning of containers accommodating semiconductor substrates and the like. Background technique [0002] Currently, semiconductor substrates and reticles are stored in containers such as FOUPs and reticle boxes, and the containers are transported by transport equipment and stored in storage or automated warehouses. Among them, in order to prevent contamination and oxidation of articles, cleaning gas such as nitrogen gas and clean dry air is supplied into the container from the nozzle through the gas introduction part. In addition, the gas introduction part is constituted by a circular elastic body having a hole in the center or the like. Regarding the supply of purge gas, Patent Document 1 (Japanese Patent Application Laid-Open No. 2012-248785 ) proposes a scheme of introducing purge gas into the container through a nozzle that can be lifted and lowered freely by using a cylinder. [0003] prior art literature ...

AI Technical Summary

Problems solved by technology

If there are traces or damages on the nozzles of the gas introduction part, when the container is transported and brought into contact with other nozzles, the cleaning gas may leak due to the marks or damages on the nozzles of the gas introduction part.

In addition, due to traces and damages on the nozzle, the gas introduction part and the nozzle may be caught, preventing the container from sliding, and causing poor positioning of the container.

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