Vacuum filter

A filter and vacuum technology, applied in the field of filters, can solve the problems of damage to vacuum pump pipelines, environmental pollution, etc., and achieve the effects of fast gas circulation, high filtration efficiency, and convenient installation structure

Inactive Publication Date: 2016-04-20
青岛赛瑞达电子科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002] In photovoltaic solar energy and some other industries, specific process gases are usually used. These process gases have a high temperature and often contain dust, especially the dust is corrosive or harmful, which not only damages the vacuum pump and the flow of the gas Pipeline, and discharge into the atmosphere will also bring environmental pollution

Method used

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Embodiment Construction

[0025] Combine below Figure 1 to Figure 5 The vacuum filter of the present invention is further described in detail.

[0026] Such as figure 1 As shown, the vacuum filter of the present invention includes a cavity 11 , a top plate 4 , a quick opening cover 5 , a flow equalizer plate 2 , a cooling pipe 6 , a filter element 5 , and a vacuum pump 8 .

[0027] The cavity 11 is a cylindrical shell, the bottom surface is an outwardly convex arc, the side is provided with an air inlet 1, and the bottom surface is provided with an air outlet 7, the air inlet 1 is connected with a specific gas pipeline through a control valve 9, and the air outlet 7 is connected to the vacuum pump 8 through the control valve 9, so that under the action of the vacuum pump 8, the specific process gas enters the cavity 11 from the inlet 1.

[0028] The center in the cavity 11 is provided with a filter element 5, the filter element 5 is a cylindrical shell, and the side wall is provided with filter hole...

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Abstract

The invention discloses a vacuum filter, and belongs to the field of filtration, which is used for solving the problems of cooling and dedusting of high-temperature and dust-contained gas in a vacuum working system. The vacuum filter comprises a cavity body, a diffuser and a filter element, wherein the cavity body is provided with a gas inlet connected with a specific gas pipeline and a gas outlet connected with a vacuum pump; the top end of the cavity body is provided with a top cover connected with the cavity body in a sealed mode; the cavity body is internally provided with the diffuser at the gas inlet; the filter element is installed at the center in the cavity body; the side wall of the filter element is provided with filter holes; the bottom surface of the filter element is provided with an opening leading to the gas outlet of the cavity body, thereby preventing the vacuum pump and an upstream-downstream system from being damaged by high-temperature, corrosive and dangerous dust particles, and solving the problem of too complex and frequent maintaining frequency of the vacuum pump of the vacuum filtration system. From the aspect of environment protection, gas in pipelines can be further cooled down and purified, and air pollution can be reduced.

Description

technical field [0001] The invention relates to a filter, in particular to a vacuum filter. Background technique [0002] In photovoltaic solar energy and some other industries, specific process gases are usually used. These process gases have a high temperature and often contain dust, especially the dust is corrosive or harmful, which not only damages the vacuum pump and the flow of the gas Pipeline, and discharge into the atmosphere will also bring environmental pollution. Contents of the invention [0003] In order to solve the above problems, the present invention provides a vacuum filter capable of filtering a specific process gas and ensuring that the specific process gas operates in a vacuum environment. [0004] The vacuum filter of the present invention includes a cavity, a flow uniform plate and a filter element, wherein the cavity is provided with an air inlet connected to a specific gas pipeline and an air outlet connected with a vacuum pump, and the top of th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D46/00B01D46/24B01D46/42B01D46/52
CPCB01D46/0005B01D46/0041B01D46/2411B01D46/4218B01D46/527B01D2271/027B01D2275/20Y02A50/2351
Inventor 张海林张文学孙世龙
Owner 青岛赛瑞达电子科技有限公司
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