A kind of tantalum alloy surface modified composite HF-TA coating and preparation method thereof
A surface modification and tantalum alloy technology is applied in the field of tantalum alloy surface modification composite Hf-Ta coating and its preparation, which can solve the problems of slow coating deposition rate, low target utilization efficiency and small coating thickness, etc. Achieve the effect of reducing oxygen transmission rate, avoiding low target utilization efficiency, and overcoming line-of-sight effects
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Embodiment 1
[0032] The tantalum alloy surface modification composite Hf-Ta coating in this embodiment is characterized in that it consists of the following components in mass percentage: Ta 20%, Si 1.2%, B 0.6%, Al 2.0%, Cr 1.8%, and the balance is Hf.
[0033] The method for preparing the modified composite Hf-Ta coating on the surface of the tantalum alloy of this embodiment comprises the following steps:
[0034] Step 1. Use 600 # SiC sandpaper pickles the surface of the tantalum alloy after grinding, and then performs sandblasting and degreasing on the surface of the tantalum alloy after pickling; the acid solution used in the pickling is composed of hydrofluoric acid and concentrated nitric acid in a volume ratio of 7: 3 mixed, the mass concentration of the hydrofluoric acid is preferably 40%, the mass concentration of the concentrated nitric acid is preferably 65%; the tantalum alloy is a Ta10W alloy; the sand grains used in the sandblasting treatment are corundum sand, The pressu...
Embodiment 2
[0039] The tantalum alloy surface modification composite Hf-Ta coating in this embodiment is characterized in that it consists of the following components in mass percentage: Ta 19.5%, Si 1.0%, B 1.0%, Al 2.0%, Cr 2.0%, and the balance is Hf.
[0040] The method for preparing the modified composite Hf-Ta coating on the surface of the tantalum alloy of this embodiment comprises the following steps:
[0041] Step 1. Use 600 # SiC sandpaper pickles the surface of the tantalum alloy after grinding, and then performs sandblasting and degreasing on the surface of the tantalum alloy after pickling; the acid solution used in the pickling is composed of hydrofluoric acid and concentrated nitric acid in a volume ratio of 3: 2 mixed, the mass concentration of the hydrofluoric acid is preferably 60%, the mass concentration of the concentrated nitric acid is preferably 68%; the tantalum alloy is a Ta10W alloy; the sand grains used in the sandblasting treatment are zirconia sand , the pre...
Embodiment 3
[0046] The tantalum alloy surface modification composite Hf-Ta coating in this embodiment is characterized in that it consists of the following components in mass percentage: Ta 20.5%, Si 1.5%, B 0.5%, Al 2.5%, Cr 1.5%, and the balance is Hf.
[0047] The method for preparing the modified composite Hf-Ta coating on the surface of the tantalum alloy of this embodiment comprises the following steps:
[0048] Step 1. Use 600 # SiC sandpaper pickles the surface of the tantalum alloy after grinding it, and then performs sandblasting and degreasing on the surface of the tantalum alloy after pickling; 1 mixed, the mass concentration of the hydrofluoric acid is preferably 50%, the mass concentration of the concentrated nitric acid is preferably 66%; the tantalum alloy is a Ta10W alloy; the sand grains used in the sandblasting treatment are zirconia sand , the pressure of the blasting treatment is 0.2MPa; preferably, the tantalum alloy is immersed in acetone for degreasing treatment;...
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