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Quartz boat

A technology of quartz and connecting rods, applied in the field of quartz boats, can solve the problems of affecting the quality of silicon wafers, not being able to store silicon wafers of different shapes at the same time, and narrow application range

Inactive Publication Date: 2016-04-20
HUZHOU OPAL QUARTZ TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But this invention has following deficiencies: the slot provided is a rectangular slot, the silicon chip is not easy to locate when inserted, easily destroys the structure on both sides of the silicon chip, and affects the quality of the silicon chip; although this invention can store silicon chips of different sizes However, it cannot store silicon wafers of different shapes at the same time. For example, different shapes can store both rectangular silicon wafers and circular silicon wafers, and the scope of application is narrow.

Method used

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  • Quartz boat
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Examples

Experimental program
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Effect test

Embodiment 1

[0018] This embodiment includes two supports 1, an upper connecting rod 2 and a lower connecting rod 3, the two supports 1 are connected as a whole through the upper connecting rod 2 and the lower connecting rod 3, and the upper connecting rod 2 is connected to the In the upper half, the lower connecting rod 3 is connected to the lower half of the support 1, and the upper connecting rod 2 and the lower connecting rod 3 are provided with a plurality of card slots 4, which are characterized in that: the card slots 4 are rectangular card slots , the inner side of the upper end of the rectangular card slot is provided with a transition fillet 5 . The inner side of the upper end of the rectangular slot in this embodiment is provided with transition rounded corners. The advantage of the transitional rounded corners is that the silicon chip can be inserted into the rectangular slot accurately without causing wear on the silicon chip and without affecting the surface quality of the sil...

Embodiment 2

[0020] This embodiment includes two supports 1, an upper connecting rod 2 and a lower connecting rod 3, the two supports 1 are connected as a whole through the upper connecting rod 2 and the lower connecting rod 3, and the upper connecting rod 2 is connected to the In the upper half, the lower connecting rod 3 is connected to the lower half of the support 1, and the upper connecting rod 2 and the lower connecting rod 3 are provided with a plurality of card slots 4, which are characterized in that: the card slots 4 are rectangular card slots , the inner side of the upper end of the rectangular card slot is provided with a transition fillet 5 . The inner side of the upper end of the rectangular slot in this embodiment is provided with transition rounded corners. The advantage of the transitional rounded corners is that the silicon chip can be inserted into the rectangular slot accurately without causing wear on the silicon chip and without affecting the surface quality of the sil...

Embodiment 3

[0023] This embodiment includes two supports 1, an upper connecting rod 2 and a lower connecting rod 3, the two supports 1 are connected as a whole through the upper connecting rod 2 and the lower connecting rod 3, and the upper connecting rod 2 is connected to the In the upper half, the lower connecting rod 3 is connected to the lower half of the support 1, and the upper connecting rod 2 and the lower connecting rod 3 are provided with a plurality of card slots 4, which are characterized in that: the card slots 4 are rectangular card slots , the inner side of the upper end of the rectangular card slot is provided with a transition fillet 5 . The inner side of the upper end of the rectangular slot in this embodiment is provided with transition rounded corners. The advantage of the transitional rounded corners is that the silicon chip can be inserted into the rectangular slot accurately without causing wear on the silicon chip and without affecting the surface quality of the sil...

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Abstract

The invention discloses a quartz boat, comprising two bearers, an upper connecting rod and a lower connecting rod. The two bearers are in connection through the upper connecting rod and the lower connecting rod to form a whole body; the upper connecting rod is connected to the upper portions of the bearers, and the lower connecting rod is connected to the lower portions of the bearers. The upper connecting rod and the lower connecting rod are both provided with a plurality of necks in a rectangular shape, wherein the upper end inner side of the rectangular neck is provided with a transition corner. According to the invention, silicon chips can be rapidly put in the quartz boat; the quartz boat can position the silicon chips without damaging silicon chip structures and influencing silicon chip qualities.

Description

technical field [0001] The invention relates to equipment used in quartz products, in particular to a quartz boat capable of storing silicon wafers. Background technique [0002] Quartz glass products are widely used in the manufacturing of integrated circuit chips in the microelectronics industry due to their excellent physical and chemical properties. Quartz boat is the tool used in diffusion. [0003] The authorized announcement number is CN202503019U, and the authorized announcement date is October 24, 2012. The Chinese invention patent discloses a multifunctional quartz boat capable of carrying silicon wafers of different specifications, which belongs to the technical field of quartz products. The multifunctional quartz boat includes a bow, a body and a stern, the body is formed by a longitudinal member, the longitudinal member includes a keel and a keel, the keel and the keel are provided with rows of card slots, so The draw-in grooves on the above-mentioned keel and...

Claims

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Application Information

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IPC IPC(8): H01L21/673H01L21/68
CPCH01L21/673H01L21/68
Inventor 沈根法宋伟宏
Owner HUZHOU OPAL QUARTZ TECH
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