Quartz boat

A technology of quartz and connecting rods, applied in the field of quartz boats, can solve the problems of affecting the quality of silicon wafers, not being able to store silicon wafers of different shapes at the same time, and narrow application range
CN105514005AInactive Publication Date: 2016-04-20HUZHOU OPAL QUARTZ TECH
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
HUZHOU OPAL QUARTZ TECH
Publication Date
2016-04-20
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a quartz boat, comprising two bearers, an upper connecting rod and a lower connecting rod. The two bearers are in connection through the upper connecting rod and the lower connecting rod to form a whole body; the upper connecting rod is connected to the upper portions of the bearers, and the lower connecting rod is connected to the lower portions of the bearers. The upper connecting rod and the lower connecting rod are both provided with a plurality of necks in a rectangular shape, wherein the upper end inner side of the rectangular neck is provided with a transition corner. According to the invention, silicon chips can be rapidly put in the quartz boat; the quartz boat can position the silicon chips without damaging silicon chip structures and influencing silicon chip qualities.
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Description

technical field

[0001] The invention relates to equipment used in quartz products, in particular to a quartz boat capable of storing silicon wafers. Background technique

[0002] Quartz glass products are widely used in the manufacturing of integrated circuit chips in the microelectronics industry due to their excellent physical and chemical properties. Quartz boat is the tool used in diffusion.

[0003] The authorized announcement number is CN202503019U, and the authorized announcement date is October 24, 2012. The Chinese invention patent discloses a multifunctional quartz boat capable of carrying silicon wafers of different specifications, which belongs to the technical field of quartz products. The multifunctional quartz boat includes a bow, a body and a stern, the body is formed by a longitudinal member, the longitudinal member includes a keel and a keel, the keel and the keel are provided with rows of card slots, so The draw-in grooves on the above-mentioned keel and...

Claims

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