Auxiliary mechanical scribing device and method for laser transparent grating blank glass substrate
A glass substrate and auxiliary machinery technology, applied in laser welding equipment, welding equipment, metal processing equipment, etc., can solve the problem of nonlinear deformation of the scribed groove surface, and achieve the effect of improving large areas
Active Publication Date: 2017-06-06
苏州艾拉托斯测量技术有限公司
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In addition, the hard stagnation area inside the aluminum coating layer produced during the mechanical scribing process will cause nonlinear deformation of the scribed groove surface
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[0014] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0015] In describing the present invention, it should be understood that the terms "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", The orientations or positional relationships indicated by "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention, rather than indicating or It should not be construed as limiting the invention by implying that a referenced device or element must have a particular orientation, be...
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The invention relates to a glass-base-assisted mechanical scribing device for a laser light-transmitting grating blank. The glass-base-assisted mechanical scribing device for the laser light-transmitting grating blank comprises a glass base, a chrome-plated film layer, an aluminum-plated film layer and a diamond cutter used for mechanical scribing, wherein the aluminum-plated film layer is connected to the glass base through the chrome-plated film layer, and the periphery of the bottom surface of the glass base is fixedly connected with a fixing and supporting part. The glass-base-assisted mechanical scribing device for the laser light-transmitting grating blank further comprises laser moving synchronously with the diamond cutter in the same direction, and the laser forms energy focus through an optical element and vertically illuminates on the mechanical scribing area after penetrating through the glass base. The invention further discloses a processing method. When the diamond cutter is used for mechanically scribing the large-area and large-groove-depth raw master grating blank, the focused laser penetrating through the glass base heats and modifies the materials at the bottom of the chrome-plated film layer and the aluminum-plated film layer, and therefore the purposes of improving the groove shape quality of the mechanically-scribed large-area and large-groove-depth raw master grating blank.
Description
technical field [0001] The invention relates to the technical field of grating mechanical scribing, in particular to a device and method for assisting mechanical scribing of a blank glass substrate of a laser transmission grating. Background technique [0002] The research shows (published literature: Chinese Journal of Mechanical Engineering, Vol. 48, No. 20, an article titled "Nanoindentation Test of Large Indentation Depth of Echelle Grating Aluminum Film" published in October 2012, the author of which is Changchun University of Science and Technology Shi Guangfeng, Shi Guoquan, Xu Zhiwei, Liu Zhe, Cai Hongbin, Zhang Baoqing from the School of Mechanical and Electrical Engineering): The original engraved master grating with large area and large groove depth is often difficult to maintain due to the thick aluminized film layer of the blank during the mechanical marking process. The material and mechanical properties of the aluminized film layer are consistent from top to b...
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IPC IPC(8): B23K26/346B23K26/064
CPCB23K26/0093B23K26/0648
Inventor 石广丰史国权许金凯张宝庆蔡洪彬
Owner 苏州艾拉托斯测量技术有限公司