Apparatus and method for filling and dispensing liquids
A technology for distributing equipment and liquids, which is applied in the direction of liquid distribution, distribution devices, special distribution devices, etc. It can solve problems such as defects, uselessness for intended purposes, and problems affecting microelectronic devices and display panel products, so as to minimize the risk of spillage, Minimize potential exposure, minimize the effect of exposure
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[0079] The present invention relates in certain aspects to improved liquid handling apparatus and methods for filling and dispensing oxygen and moisture sensitive materials. In a particular aspect, the present invention relates to liner-based liquid containment systems and methods for storing, shipping, and dispensing high-purity chemical reagents and components, such as photoresists, etchants, chemical vapor deposition reagents, Solvents, wafer cleaning formulations, tool cleaning formulations, chemical mechanical polishes, color filter chemicals, overcoat coatings and liquid crystal materials.
[0080] In using a liner-based package for storing and dispensing fluid materials, wherein the liner is mounted in an outer vessel (e.g., preferably substantially rigid, but optionally semi-rigid), the dispensing operation may involve The flow of gas into the vessel outside the liner to the pressure distribution such that the pressure exerted by the gas forces the liner to be progress...
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