Apparatus and method for filling and dispensing liquids

A technology for distributing equipment and liquids, which is applied in the direction of liquid distribution, distribution devices, special distribution devices, etc. It can solve problems such as defects, uselessness for intended purposes, and problems affecting microelectronic devices and display panel products, so as to minimize the risk of spillage, Minimize potential exposure, minimize the effect of exposure

Active Publication Date: 2018-01-05
ENTEGRIS INC
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In the field of microelectronics and display panel manufacturing, the need for proper packaging is especially mandatory for a wide variety of liquids due to any contamination in the packaged material, and / or the environment The ingress of contaminants into the contained materials in the packaging can adversely affect the microelectronic device and display panel products manufactured using such liquids, causing the resulting products to be defective, or even defective for their intended use. Useless

Method used

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  • Apparatus and method for filling and dispensing liquids
  • Apparatus and method for filling and dispensing liquids
  • Apparatus and method for filling and dispensing liquids

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Embodiment Construction

[0079] The present invention relates in certain aspects to improved liquid handling apparatus and methods for filling and dispensing oxygen and moisture sensitive materials. In a particular aspect, the present invention relates to liner-based liquid containment systems and methods for storing, shipping, and dispensing high-purity chemical reagents and components, such as photoresists, etchants, chemical vapor deposition reagents, Solvents, wafer cleaning formulations, tool cleaning formulations, chemical mechanical polishes, color filter chemicals, overcoat coatings and liquid crystal materials.

[0080] In using a liner-based package for storing and dispensing fluid materials, wherein the liner is mounted in an outer vessel (e.g., preferably substantially rigid, but optionally semi-rigid), the dispensing operation may involve The flow of gas into the vessel outside the liner to the pressure distribution such that the pressure exerted by the gas forces the liner to be progress...

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Abstract

A shippable liquid storage and dispense device comprising a collapsible liner disposed within a container, the shippable liquid storage and dispense device having a Dispensing head, suitable for handling oxygen and moisture sensitive materials. The dispense head includes a pressurized gas passage, a pressurized gas valve, a liquid passage, a liquid valve, a lined gas passage, and a lined gas valve, each of which may have an associated quick connect fitting. The dispensing head remains attached to the container during inert gas purging, liner filling, container shipping and liquid dispensing. During shipment of the coupled dispensing head and container, a pressurized inert gas may be maintained in the liner, covering the liquid-containing material. The container may have an extended chime to provide a protective area that accommodates the entire dispensing head.

Description

[0001] Cross References to Related Applications [0002] This application claims the benefit of US Provisional Patent Application No. 61 / 845,315, filed July 11, 2013, the disclosure of which is hereby incorporated by reference in its entirety. technical field [0003] The present invention relates to liquid handling and dispensing systems and methods, such as may be used to fill containers and allow the contents of such containers to be dispensed. In one particular aspect, the present invention relates to filling and dispensing environmentally sensitive (eg, oxygen sensitive and / or moisture sensitive) liquids from liner-based containers while minimizing or reducing exposure between such liquids and the surrounding environment. Associated parts deal with the manufacture, use and development of such systems. Background technique [0004] In many industrial applications, chemical reagents and ingredients need to be supplied in a state of high purity, and specialized packaging ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B65D83/14B65D83/38
CPCB67D7/0261B67D7/72B67D7/0288B67D1/0802B67D1/1252B67D2001/0828
Inventor 唐纳德·D·韦尔埃米·科兰理查德·李·威尔逊
Owner ENTEGRIS INC
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