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Apparatus for the plasma treatment of surfaces and a method for treating surfaces with plasma

A technology of plasma and gas, applied in the bonding method of surface pretreatment, the device of coating liquid on the surface, plasma, etc., can solve the problems of material erosion and so on

Inactive Publication Date: 2016-05-04
TESA SE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Higher intensity treatments also lead to significant erosion of material

Method used

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  • Apparatus for the plasma treatment of surfaces and a method for treating surfaces with plasma
  • Apparatus for the plasma treatment of surfaces and a method for treating surfaces with plasma
  • Apparatus for the plasma treatment of surfaces and a method for treating surfaces with plasma

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Embodiment Construction

[0049] A schematic representation of a device 1 according to the invention for the plasma treatment of a surface 2 is shown in figure 1 The first embodiment in has a first electrode 4 which is formed as a tube and forms the process gas channel 3 inside it. In this embodiment, the first electrode 4 coincides with its housing. During operation of the device, for each electrode or for each head of an electrode, the process gas is guided through the process gas channel 3 at a low flow volume of eg 10 l / min. In a flow direction aligned opposite to the direction of the height H, the process gas channel 3 ends in the outlet 5 .

[0050] exist figure 1 In , only the electrode tip 4a of the first electrode 4 is shown. The electrode tip 4 a is entirely manufactured from an electrically conductive material, such as high-grade steel, iron or copper alloy, and is connected to an alternating voltage source 6 . The alternating voltage source 6 generates an alternating or pulsed high volt...

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Abstract

Apparatus for the plasma treatment of surfaces (2) with a first electrode (4) and a second electrode (7) and an alternating voltage source (6) between the first electrode (4) and the second electrode (7), and an electrical field, forming at least between the first electrode (4) and the second electrode (7), an effective area (9), which is arranged in front of the first electrode (4) and in which the surface (2) to be treated can be positioned, and the second electrode (7) is arranged closer to the effective area (9) than the first electrode (4), characterized in that at least one process gas channel (3) for at least one stream of process gas with at least one outlet (5) at the first electrode (4) is provided and the at least one outlet (5) points in the direction of the effective area (9); and the at least one stream of process gas impinges on the electrical field and the electrical field converts the at least one stream of process gas into a stream of plasma and the stream of plasma impinges on the effective area (9).

Description

technical field [0001] The invention relates to a device for plasma treatment of surfaces having a first electrode and a second electrode and an alternating voltage source between the first electrode and the second electrode, and between the first electrode and the second electrode An electric field is formed and has an active area arranged in front of the first electrode and in which the surface to be treated can be located, the second electrode being arranged closer to the active area than the first electrode. [0002] The invention also relates to a method for treating a surface with a plasma, wherein an alternating voltage is applied between a first electrode and a second electrode, between which an alternating electric field is generated, the surface to be treated being located in front of the first electrode And the second electrode is arranged closer to the surface than the first electrode. Background technique [0003] When adhering surfaces one on top of the other ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/32
CPCH01J37/32532H01J37/32807H05H1/2406B29C59/14B05D3/144C09J5/02H01J37/3244H01J37/32541H01J37/32568H05H1/2431H05H1/2418H01J2237/3322H01J2237/336
Inventor M.黑内尔
Owner TESA SE
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