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Air curtain device

An air curtain and air pressure technology, which is applied in the directions of drying gas arrangement, electrical components, and cleaning methods using gas flow, etc., can solve the problems of affecting the isolation effect of the air curtain device, the air pressure fluctuation of the air outlet 03, and the defective array substrate.

Active Publication Date: 2016-05-11
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In practical applications, the gas flow rate flowing into the air inlet 02 may suddenly increase, causing fluctuations in the air pressure of the air outlet 03, affecting the isolation effect of the air curtain device, and may even cause foreign matter to be ejected and cause problems such as failure of the array substrate.

Method used

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Embodiment Construction

[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention.

[0031] In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0032] Embodiments of the present invention provide an air curtain device, such as figure 2 As shown, it includes: a pressure limiting module 11, and an air curtain main body 12 communicating with the pressure limiting...

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Abstract

An embodiment of the invention provides an air curtain device and relates to the technical field of display, and thus flow stability of airflow output by the air curtain device can be guaranteed, and yield rate of a prepared array substrate is improved. The air curtain device comprises a pressure limit module and an air curtain main body communicated with the pressure limit module. The pressure limit module is internally provided with a pressure limit cavity. An air inlet of the pressure limit cavity is communicated with the external world; a first air outlet of the pressure limit cavity is communicated with the air curtain main body; the pressure limit cavity is internally provided with an air pressure linkage mechanism; and the air pressure linkage mechanism can change the cross sectional area of the first air outlet with the change of the pressure in the pressure limit cavity to enable the pressure of the airflow output from the first air outlet to be within a preset range. The method can be applied to the manufacturing process of the thin-film transistor array substrate.

Description

technical field [0001] The invention relates to the field of display technology, in particular to an air curtain device. Background technique [0002] In the wet stripping process of the semiconductor and thin film transistor array substrate manufacturing technology, the wet stripping chemical solution is generally used to remove the photoresist; the wet stripping process is a process after the etching process, which refers to the removal of the remaining photoresist on the glass substrate. Engraving. These photoresists can be removed by using a wet stripping solution, and then the glass substrate enters the deionized water area for cleaning. In order to remove the stripping liquid remaining on the glass substrate, an air curtain (Air Curtain) device is usually used to remove the stripping liquid remaining on the glass substrate, so as to avoid the influence of the remaining stripping liquid on the next process. [0003] like figure 1 Shown is a schematic structural view ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67
CPCH01L21/67028H01L21/67034F26B21/004B08B5/02
Inventor 张春泽李伟于凯刘聪
Owner BOE TECH GRP CO LTD
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