Compound MEMS bionic hydrophone
A hydrophone and composite technology, applied in the field of composite MEMS bionic hydrophone, can solve the problems of starboard and starboard ambiguity, sensitivity and unsatisfactory frequency response bandwidth, etc., to overcome inconsistency, widen the effective frequency band range, and simple structure Effect
Active Publication Date: 2016-05-25
ZHONGBEI UNIV
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[0003] The purpose of the present invention is to provide a composite MEMS bionic hydrophone to solve the problems that the existing MEMS vector hydrophone can only measure the sound field vector information, the sensitivity and the frequency response bandwidth are not ideal, and the left and right sides are blurred.
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[0024] The present invention will be further described below in conjunction with accompanying drawing:
[0025] Such as figure 1 , 2 As shown, a composite MEMS bionic hydrophone includes a circular bottom silicon 1, an oxide insulating layer 2 is oxidized on the bottom silicon 1, and a circular top silicon 3 is bonded on the oxide insulation layer 2; the top silicon The middle part of 3 is arranged with four groups of four-beam cilia type acoustic-electric transduction structures 4 in the form of rows and columns, and four groups of four-beam cilia-type acoustic-electric transduction structures 4 are symmetrically arranged around the center of the top silicon 3, wherein the four-beam cilia The acoustic-electric transducing structure 4 includes a square window 4-4 set on the top layer of silicon 3, the center of the square window 4-4 is provided with a square central connector 4-3, and the four sides of the central connector 4-3 pass through four The root cantilever beam 4-1...
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The invention discloses a compound MEMS bionic hydrophone, for solving the problems of single function of measuring sound field vector information, not ideal sensitivity and frequency response bandwidth, portside and starboard fuzziness and the like existing in a conventional MEMS vector hydrophone. The hydrophone comprises bottom-layer silicon, an oxidation insulation layer and top-layer silicon, four groups of four-beam cilia type acoustoelectric energy conversion structures are uniformly distributed on the top-layer silicon, and the oxidation insulation layer right below the four groups of four-beam cilia type acoustoelectric energy conversion structures is etched away; four cavities are uniformly distributed on the oxidation insulation layer, upper electrodes and lower electrodes are sputtered at positions, right opposite to each cavity, on the top-layer silicon and the bottom-layer silicon, and four oil filler holes communicating with the cavities are uniformly distributed around each upper electrode on the top-layer silicon. The hydrophone provided by the invention is simple in structure, greatly widens the effective frequency band scope, facilitates installation and testing due to monolithic integration, improves the installation precision, finally realizes a sensor array in a small volume through a single sensor, and overcomes inconsistency of each hydrophone in a conventional array.
Description
technical field [0001] The invention relates to the technical field of MEMS bionic hydrophones, in particular to a composite MEMS bionic hydrophone. Background technique [0002] The vector sensor has the function of locating the underwater sound source target, and can be used as an important equipment for obstacle avoidance of various civil ships, fishing, and ocean exploration. With the rise of the MEMS industry, vector hydrophones are gradually developing towards miniaturization and integration, and have broad military and civilian prospects. Because the existing MEMS vector hydrophone can only measure the sound field vector information, and the sensitivity and frequency response bandwidth are not ideal, there are defects such as blurring of starboard and starboard. However, in the same test process, it is often encountered that the magnitude and frequency of many sound source signals to be measured are different, and accurate positioning of the sound signals is required...
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IPC IPC(8): G01H11/06
CPCG01H11/06
Inventor 张国军刘梦然张文栋
Owner ZHONGBEI UNIV