Anti-impact structure used for multi-level vacuum pump and multi-stage vacuum pump comprising same
A vacuum pump and anti-shock technology, which is applied to parts, pumps, and pump components of elastic fluid pumping devices, and can solve problems such as increased pressure difference, increased cavity backflow, and affecting pumping speed, etc. Achieve the effect of reducing the compression process, reducing backflow, and increasing pumping speed
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Embodiment 1
[0021] An anti-shock structure for a multi-stage vacuum pump includes a vacuum pump cavity 1, a pressure control valve 3, an exhaust switching valve 4 and an impact pipeline 5, wherein the bottom of the vacuum pump cavity 1 is provided with a cavity exhaust port, the One end of the impact pipeline 5 communicates with the exhaust port of the cavity, and the other end communicates with the exhaust pipeline of the multi-stage vacuum pump. The impact pipeline 5 is provided with a pressure control valve 3 and an exhaust switching valve 4 . An exhaust pressure sensor 2 for controlling a pressure control valve 3 is provided at the exhaust port of the cavity. The anti-shock structure can complete the process of exhausting to the exhaust pipeline when the vacuum pump of this level pumps high-pressure process gas and reaches the exhaust pressure set by the vacuum pump of this level.
Embodiment 2
[0023] An anti-shock structure for a multi-stage vacuum pump includes a vacuum pump cavity 1, a pressure control valve 3 and an impact pipeline 5, wherein the bottom of the vacuum pump cavity 1 is provided with a cavity exhaust port, and one end of the impact pipeline 5 It communicates with the exhaust port of the cavity, and the other end communicates with the exhaust pipeline of the multi-stage vacuum pump. The impact pipeline 5 is provided with a pressure control valve 3, and the exhaust port of the cavity is provided with a valve for controlling the pressure. Exhaust pressure sensor 2 that controls valve 3. The anti-shock structure can complete the process of exhausting to the exhaust pipeline when the vacuum pump of this level pumps high-pressure process gas and reaches the exhaust pressure set by the vacuum pump of this level.
Embodiment 3
[0025] An anti-shock structure for a multi-stage vacuum pump includes a vacuum pump cavity 1, an exhaust switching valve 4 and an impact pipeline 5, wherein the bottom of the vacuum pump cavity 1 is provided with a cavity exhaust port, and the impact pipeline 5 One end communicates with the exhaust port of the cavity, and the other end communicates with the exhaust pipeline of the multi-stage vacuum pump. The impact pipeline 5 is provided with an exhaust switching valve 4 . The anti-shock structure can complete the process of exhausting to the exhaust pipeline when the vacuum pump of this level pumps high-pressure process gas and reaches the exhaust pressure set by the vacuum pump of this level.
[0026] The anti-shock structure can realize the impact protection of multi-stage vacuum pumps used in loading chambers, unloading chambers and other pumps that frequently work under atmospheric pressure. In the actual process, when the atmosphere is extracted, under the action of the...
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