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Anti-impact structure used for multi-level vacuum pump and multi-stage vacuum pump comprising same

A vacuum pump and anti-shock technology, which is applied to parts, pumps, and pump components of elastic fluid pumping devices, and can solve problems such as increased pressure difference, increased cavity backflow, and affecting pumping speed, etc. Achieve the effect of reducing the compression process, reducing backflow, and increasing pumping speed

Active Publication Date: 2016-06-08
SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] As mentioned above, the pressure of the working medium is high during the compression process, the pressure difference between the relative levels will also increase, and the backflow of the cavity will increase; it will affect the pumping speed of the pump in the low pressure section

Method used

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  • Anti-impact structure used for multi-level vacuum pump and multi-stage vacuum pump comprising same
  • Anti-impact structure used for multi-level vacuum pump and multi-stage vacuum pump comprising same

Examples

Experimental program
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Effect test

Embodiment 1

[0021] An anti-shock structure for a multi-stage vacuum pump includes a vacuum pump cavity 1, a pressure control valve 3, an exhaust switching valve 4 and an impact pipeline 5, wherein the bottom of the vacuum pump cavity 1 is provided with a cavity exhaust port, the One end of the impact pipeline 5 communicates with the exhaust port of the cavity, and the other end communicates with the exhaust pipeline of the multi-stage vacuum pump. The impact pipeline 5 is provided with a pressure control valve 3 and an exhaust switching valve 4 . An exhaust pressure sensor 2 for controlling a pressure control valve 3 is provided at the exhaust port of the cavity. The anti-shock structure can complete the process of exhausting to the exhaust pipeline when the vacuum pump of this level pumps high-pressure process gas and reaches the exhaust pressure set by the vacuum pump of this level.

Embodiment 2

[0023] An anti-shock structure for a multi-stage vacuum pump includes a vacuum pump cavity 1, a pressure control valve 3 and an impact pipeline 5, wherein the bottom of the vacuum pump cavity 1 is provided with a cavity exhaust port, and one end of the impact pipeline 5 It communicates with the exhaust port of the cavity, and the other end communicates with the exhaust pipeline of the multi-stage vacuum pump. The impact pipeline 5 is provided with a pressure control valve 3, and the exhaust port of the cavity is provided with a valve for controlling the pressure. Exhaust pressure sensor 2 that controls valve 3. The anti-shock structure can complete the process of exhausting to the exhaust pipeline when the vacuum pump of this level pumps high-pressure process gas and reaches the exhaust pressure set by the vacuum pump of this level.

Embodiment 3

[0025] An anti-shock structure for a multi-stage vacuum pump includes a vacuum pump cavity 1, an exhaust switching valve 4 and an impact pipeline 5, wherein the bottom of the vacuum pump cavity 1 is provided with a cavity exhaust port, and the impact pipeline 5 One end communicates with the exhaust port of the cavity, and the other end communicates with the exhaust pipeline of the multi-stage vacuum pump. The impact pipeline 5 is provided with an exhaust switching valve 4 . The anti-shock structure can complete the process of exhausting to the exhaust pipeline when the vacuum pump of this level pumps high-pressure process gas and reaches the exhaust pressure set by the vacuum pump of this level.

[0026] The anti-shock structure can realize the impact protection of multi-stage vacuum pumps used in loading chambers, unloading chambers and other pumps that frequently work under atmospheric pressure. In the actual process, when the atmosphere is extracted, under the action of the...

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PUM

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Abstract

The invention relates to the technical field of vacuum pumps, in particular to an anti-impact structure used for a multi-level vacuum pump and the multi-level vacuum pump comprising the same. The anti-impact structure used for the multi-level vacuum pump comprises a vacuum pump cavity, a pressure control valve, an exhaust switch valve and an impact pipeline, wherein the vacuum pump cavity is provided with a cavity exhaust outlet, one end of the impact pipeline communicates with the cavity exhaust outlet, the other end of the impact pipeline communicates with an exhaust pipeline of the multi-level vacuum pump, and the impact pipeline is provided with the pressure control valve and / or the exhaust switch valve. A first-level vacuum pump cavity and a second-level vacuum pump cavity of the multi-level vacuum pump are both provided with the anti-impact structures. According to the anti-impact structure used for the multi-level vacuum pump and the multi-level vacuum pump comprising the same, compressed working media with allowable exhaust pressure are directly discharged to the exhaust outlets, and due to the fact that the compression processes are reduced, countercurrent flow caused by the cavity level pressure difference can be reduced, and the pumping speed at a low vacuum stage can be increased.

Description

technical field [0001] The invention relates to the technical field of vacuum pumps, in particular to an anti-shock structure for a multistage vacuum pump and the multistage vacuum pump with the structure. Background technique [0002] When the vacuum pump absorbs the working medium, the pump cavity and the rotor will compress the working medium, which will form a large compression ratio. The value of the compression ratio is usually between 3 and 100. The compression ratio of the common mechanical vacuum pump is between 2 and 15. The actual way to measure the compression ratio of the pump is to measure the pressure at the inlet and outlet of the pump. For example, the inlet pressure of the Roots pump is 1Pa, the back pressure provided by the front stage is 15Pa, and the compression ratio of the pump is 15. Under the condition of fixed compression ratio, the multi-stage vacuum pump absorbs the working medium of 1 atmospheric pressure, and can form a theoretical value of 15 a...

Claims

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Application Information

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IPC IPC(8): F04C25/02F04C29/12F04C29/00
Inventor 王光玉孔祥玲张晓玉雷震霖
Owner SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI