Preparation method of glass needle-shaped defect reflective electron microscope sample

A production method and electron microscope sample technology, applied in the field of glass, can solve problems such as difficult realization and low success rate, and achieve the effects of low cost, increased success rate, and improved glass quality

Active Publication Date: 2016-06-08
WUHU DONGXU OPTOELECTRONICS EQUIP TECH +2
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  • Application Information

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Problems solved by technology

The existing cross-section method and polishing method have a low success rate for pre...

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  • Preparation method of glass needle-shaped defect reflective electron microscope sample
  • Preparation method of glass needle-shaped defect reflective electron microscope sample

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Embodiment 1

[0038] This embodiment is used to illustrate the preparation method of the glass needle-shaped defect reflection electron microscope sample of the present invention.

[0039] (1) Cut the non-defective glass and the defective glass into a size of 5mm×150mm×0.5mm;

[0040] (2) Place the defect-free glass in 10wt% HF solution, and after eroding for 1800s, measure the erosion depth with a metallographic microscope, which is 120 μm, and the erosion speed is 0.067 μm / s;

[0041] (3) Use a metallographic microscope to determine the size and position of the needle-like defects in the defective glass (such as figure 1 As shown, the length of the needle-shaped defect is 293.60 μm, and the diameter is 1.00 μm), and a circle is drawn at the position of the needle-shaped defect with a marker pen to mark, and the distance between the needle-shaped defect and the upper and lower surfaces of the defective glass is measured, respectively are 405 μm and 94 μm, according to the minimum distance...

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Abstract

The invention relates to the field of glasses, and discloses a preparation method of a glass needle-shaped defect reflective electron microscope sample. The preparation method comprises the following steps of (1) putting defect-free glass in an erosion liquid to obtain an erosion speed; (2) measuring the minimum distance between a needle-shaped defect and the surface of the defect glass, and obtaining the theoretical erosion time for the erosion liquid to erode the defect glass until the needle-shaped defect is exposed; (3) putting the defect glass into the erosion liquid to erode, controlling the erosion time, and exposing the needle-shaped defect at the surface of the glass. The preparation method has the advantages that the problem of difficult preparation of the needle-shaped defect reflective electron microscope sample is solved; the speed is high, the sample preparation is accurate, and the cost is low.

Description

technical field [0001] The invention relates to the field of glass, in particular to a method for preparing a glass needle-shaped defect reflection electron microscope sample. Background technique [0002] In the field of flat glass, LCD panels have the characteristics of high resolution, low power consumption, and fast response. Low-temperature polysilicon LTPS is the development direction of future panels. Its fine wiring structure and high process temperature have higher and higher requirements for glass substrate defects. Therefore, a convenient method is needed to improve the quality of glass and adjust the glass preparation process accordingly. . By preparing electron microscope samples with needle-like defects in glass and detecting their crystallization components, the glass preparation process can be regulated in turn to produce defect-free glass, which is conducive to the improvement of glass quality. [0003] In the existing process, needle-shaped platinum defec...

Claims

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Application Information

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IPC IPC(8): G01N1/32
CPCG01N1/32
Inventor 李志勇张广涛李俊锋闫冬成王丽红胡恒广
Owner WUHU DONGXU OPTOELECTRONICS EQUIP TECH
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