A kind of manufacturing method of glass needle-shaped defect reflective electron microscope sample

A production method and electron microscope sample technology, applied in the field of glass, can solve problems such as low success rate and difficult realization, and achieve the effects of low cost, accurate sample preparation and improved success rate

Active Publication Date: 2018-09-14
WUHU DONGXU OPTOELECTRONICS EQUIP TECH +2
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The existing cross-section method and polishing method have a low success rate for preparing glass needle-shaped defect electron microscope samples, and it is not easy to achieve

Method used

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  • A kind of manufacturing method of glass needle-shaped defect reflective electron microscope sample
  • A kind of manufacturing method of glass needle-shaped defect reflective electron microscope sample

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Experimental program
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Effect test

Embodiment 1

[0038] This embodiment is used to illustrate the preparation method of the glass needle-shaped defect reflection electron microscope sample of the present invention.

[0039] (1) Cut the non-defective glass and the defective glass into a size of 5mm×150mm×0.5mm;

[0040] (2) Place the defect-free glass in 10wt% HF solution, and after eroding for 1800s, measure the erosion depth with a metallographic microscope, which is 120 μm, and the erosion speed is 0.067 μm / s;

[0041] (3) Use a metallographic microscope to determine the size and position of the needle-like defects in the defective glass (such as figure 1 As shown, the length of the needle-shaped defect is 293.60 μm, and the diameter is 1.00 μm), and a circle is drawn at the position of the needle-shaped defect with a marker pen to mark, and the distance between the needle-shaped defect and the upper and lower surfaces of the defective glass is measured, respectively are 405 μm and 94 μm, according to the minimum distance...

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Abstract

The invention relates to the field of glass, and discloses a method for manufacturing a glass needle-shaped defect reflection electron microscope sample. The method includes: (1) placing the defect-free glass in an etching solution to obtain the erosion speed; (2) measuring the needle-shaped defect and The minimum distance on the surface of the defective glass is used to obtain the theoretical erosion time used by the etching liquid to erode the defective glass until the needle-shaped defect is exposed; (3) put the defective glass in the etching liquid for erosion, and control the erosion time so that the needle-shaped defect is exposed on the glass surface . The method of the invention well solves the problem that it is difficult to make needle-shaped defect electron microscope samples, and is fast, accurate in sample preparation and low in cost.

Description

technical field [0001] The invention relates to the field of glass, in particular to a method for preparing a glass needle-shaped defect reflection electron microscope sample. Background technique [0002] In the field of flat glass, LCD panels have the characteristics of high resolution, low power consumption, and fast response. Low-temperature polysilicon LTPS is the development direction of future panels. Its fine wiring structure and high process temperature have higher and higher requirements for glass substrate defects. Therefore, a convenient method is needed to improve the quality of glass and adjust the glass preparation process accordingly. . By preparing electron microscope samples with needle-like defects in glass and detecting their crystallization components, the glass preparation process can be regulated in turn to produce defect-free glass, which is conducive to the improvement of glass quality. [0003] In the existing process, needle-shaped platinum defec...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N1/32
CPCG01N1/32
Inventor 李志勇张广涛李俊锋闫冬成王丽红胡恒广
Owner WUHU DONGXU OPTOELECTRONICS EQUIP TECH
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