A sample stage for electron backscatter diffractometer
An electron backscattering and sample stage technology, which is used in material analysis, instruments, circuits, etc. using wave/particle radiation. It can solve the problems of limited moving space, large moving position, and easy collision with BSE probes, so as to avoid collision problems. , the effect of ensuring safety
Active Publication Date: 2019-03-29
NANJING UNIV
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Problems solved by technology
When the sample stage is gradually tilted at a high angle, the moving space is very limited, and when the sample size is large, the moving position is relatively large, and it is easy to collide with the BSE probe or EBSD probe, reducing the safety of the experiment
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[0016] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. Hereinafter, embodiments of the present invention will be described in detail, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention. Those skilled in the art will understand that unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the word "comprising" used in the description of the present invention refe...
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An embodiment of the invention discloses a sample stage for electron backscatter diffraction instruments, and relates to the field of rock sample analysis and tests. The sample stage is characterized in that a 70-degree included angle is formed between a fixing plane of the sample stage and a base, a groove is formed in the fixing plane and is used for mounting and fixing a slice sample, and the size of the groove is matched with that of the slice sample; the depth of the groove is consistent with the thickness of the slice sample, and to-be-measured surfaces of the slice sample and the surface of the fixing plane are positioned on the same plane when the slice sample is mounted in the groove. A standard sample groove for mounting a single-crystal silicon standard sample is formed in the fixing plane, the depth of the standard sample groove is consistent with the thickness of the single-crystal silicon standard sample, to-be-measured surfaces of the single-crystal silicon standard sample and the surface of the fixing plane are positioned on the same plane when the single-crystal silicon standard sample is mounted in the standard sample groove. The sample stage has the advantages that the safety of experiments can be guaranteed, and requirements on carrying out tests with the standard sample on samples with large sizes and poor electric conductivity can be met; the sample stage is applicable to the tests with the standard sample on the samples with the large sizes and the poor electric conductivity.
Description
technical field [0001] The invention relates to the field of rock sample analysis and testing, in particular to a sample stage for an electron backscattering diffractometer. Background technique [0002] Electron backscatter diffraction (EBSD) technology provides micron-scale crystal spatial orientation information by observing the diffraction image of backscattered electrons, which can accurately and quickly determine the preferred orientation of mineral crystal lattice and the orientation of each mineral in multiphase rocks. Therefore, it has a wide range of applications in materials science, geology, metallurgy and other fields. [0003] The currently commonly used EBSD is based on a scanning electron microscope, which consists of a fluorescent phosphor screen for imaging and a high-sensitivity CCD digital camera for capturing diffraction images. The backscattering (BSE) probe and EBSD probe are in the experimental The Z and Y axes of the coordinate system. During the e...
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IPC IPC(8): G01N23/203G01N23/205H01J37/28
CPCG01N23/203G01N23/205G01N2223/309H01J37/28
Inventor 李娟王勤陆现彩陆建军
Owner NANJING UNIV