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Vapor deposition support plate and vapor deposition device

A carrier plate and evaporation technology, which is applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of OLED substrate deformation, fragmentation or overall fragmentation, affecting production cycle and product yield, etc. To achieve the effect of avoiding product yield

Active Publication Date: 2016-07-06
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In order to solve the problem in the prior art that the OLED substrate is separated from the vapor deposition carrier due to the external force applied by the thimble of the thimble device, which may easily lead to deformation, fragmentation or overall fragmentation of the OLED substrate, and affect the production cycle and product yield. An example provides an evaporation carrier and an evaporation device

Method used

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  • Vapor deposition support plate and vapor deposition device
  • Vapor deposition support plate and vapor deposition device
  • Vapor deposition support plate and vapor deposition device

Examples

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Embodiment 1

[0062] Such as figure 1 As shown, the embodiment of the present invention provides an evaporation carrier, the evaporation carrier includes a carrier 1 and a viscosity reducing part 2, the viscosity reducing part 2 is arranged on the carrier 1, and the OLED substrate 3 is fixed by a sensitive glue 4 On one side surface of the carrier plate 1 , the viscosity reducing part 2 is used to reduce the viscosity of the sensitive glue 4 after evaporation is completed.

[0063] Such as figure 2 shown, and see figure 1, in the embodiment of the present invention, when it is necessary to vapor-deposit organic materials on the OLED substrate 3, the OLED substrate 3 is first fixed on one side surface of the evaporation carrier provided by the embodiment of the present invention through the sensitive glue 4, and then the The evaporation carrier is transferred into the vacuum evaporation chamber 6 with the OLED substrate 3 facing down. The vacuum evaporation chamber 6 is provided with an e...

Embodiment 2

[0093] An embodiment of the present invention provides an evaporation device, the evaporation device includes an evaporation carrier, wherein the structural schematic diagram of the evaporation carrier is as follows figure 1 shown.

[0094] In the present invention, the viscosity reducing part 2 of the vapor deposition carrier is used to reduce the viscosity of the sensitive adhesive 4 after the vapor deposition is completed, so that the OLED substrate 3 and the vapor deposition carrier are separated, and avoid the separation of the vapor deposition carrier and the OLED substrate 3 by external force. The OLED substrate 3 is deformed, fragmented or completely broken, so as to avoid affecting the production cycle and product yield.

[0095] The serial numbers of the above embodiments of the present invention are for description only, and do not represent the advantages and disadvantages of the embodiments.

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Abstract

The invention discloses a vapor deposition support plate and a vapor deposition device and belongs to the field of vapor deposition equipment. The vapor deposition support plate comprises a support plate body and a viscosity reduction part. The viscosity reduction part is arranged on the support plate body. An OLED substrate is fixed to the surface of one side of the support plate body through sensitive glue. The viscosity reduction part is used for reducing the viscosity of the sensitive glue after completion of vapor deposition. According to the vapor deposition support plate, the viscosity reduction part is used for reducing the viscosity of the sensitive glue after completion of vapor deposition, so that the OLED substrate is separated from the vapor deposition support plate, and the situation that deformation and fragments happen to the OLED substrate or the OLED substrate is totally broken due to the fact that the vapor deposition support plate and the OLED substrate are separated by external force is avoided. Accordingly, the production takt and the yield of products are not affected.

Description

technical field [0001] The invention relates to the field of evaporation equipment, in particular to an evaporation carrier plate and an evaporation device. Background technique [0002] When manufacturing an OLED (Organic Light Emitting Diode, an organic light emitting diode), a crucible is used to vapor-deposit the organic material used for making the OLED on the OLED substrate. Wherein, both the crucible and the OLED substrate are placed in a vacuum evaporation chamber, and the OLED substrate is fixed above the crucible through an evaporation carrier. [0003] The current evaporation carrier includes a carrier board with pin holes. During evaporation, the OLED substrate is first adhered to the lower surface of the carrier board with sticky suction cup glue, and then the carrier board is transferred into the evaporation chamber. chamber, using a crucible to vapor-deposit the organic material used to make OLEDs on the OLED substrate. After the evaporation is completed, tur...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/12C23C14/24C23C14/50H01L51/56H10K99/00
CPCC23C14/12C23C14/24C23C14/50H10K71/164H10K71/80H10K71/00C23C14/243
Inventor 上官荣刚孙力王欣欣马凯葓万想
Owner BOE TECH GRP CO LTD