A silicon substrate for magnetic recording medium is provided, which, even though it is a silicon substrate of a fragile material, is not prone to chip on the substrate edge faces or cracks on the substrate, and which prevents debris from being produced from the substrate edge faces, and which prevents debris from being produced by rubbing against a process cassette. Therefore, in a silicon substrate for a magnetic recording medium, in which there is provided a chamfer section between a main surface of the substrate and an edge face, the edge face and chamfer section of the substrate are of mirror finish, and a curved surface with a radius of greater than or equal to 0.01 mm and less than 0.3 mm is interposed between the main surface of the substrate and the chamfer section. In forming the curved surface, a silicon substrate stack with a plurality of silicon substrates and spacers laminated is prepared, and the inner periphery of a central hole of the substrates, and an outer periphery of the substrates are brush polished.