Integrated interference type micro-displacement optical fiber sensor, calibration device thereof and calibration method thereof

Abstract

The invention discloses an integrated interference type micro-displacement optical fiber sensor, a calibration device thereof and a calibration method for the same. The integrated interference type micro-displacement optical fiber sensor comprises an optical fiber collimator, a super small optical fiber lens, an optical fiber interference module, an indication laser device, a broadband laser device, a data collection card and a computer. The calibration device of the integrated interference type micro-displacement optical fiber sensor comprises an object reflector, a fixed platform, and a five-dimension regulation table with threads. The calibration method of the integrated interference type micro-displacement optical fiber sensor comprises steps of enabling the output terminal of the super small optical fiber lens to directly face the object reflector, moving the five-dimension regulation table with threads through an axis, and obtaining a function relation between the voltage of outputting the interference intensity and the micro-displacement, wherein the function relation is the calibration function of the integrated interference type micro-displacement optical fiber sensor. The calibration method disclosed by the invention can be used for the micro-displacement calibration which is high in accuracy and fast in measurement.

Description

technical field [0001] The invention relates to an integrated interference type micro-displacement optical fiber sensor, a calibration device and a calibration method thereof, which are used in the field of measurement of micro-displacement. Background technique [0002] With the development of testing instruments towards integration and high precision, the precise detection of displacement in the scientific research and production process, especially in the micro-displacement endoscopic measurement, is becoming more and more demanding. Optical fiber sensor is gradually formed along with the development of optical fiber and communication technology. The optical fiber sensor uses the change of the propagation characteristics of light in the optical fiber to modulate the optical wave in the waveguide, so that the optical wave parameter in the optical fiber changes with the change of the measured signal, so as to obtain the magnitude of the measured signal. An integrated inter...

AI Technical Summary

Problems solved by technology

However, for integrated interferometric micro-displacement fiber optic sensors, although there are separate fiber optic interferometer modules and sensor calibration devices on the market, there is a lack of commercial or dedicated integrated interferometric micro-displacement fiber optic sensors based on ultra-small fiber optic lenses.

[0003] A typical integrated interferometric micro-displacement optical fiber sensor should include a fiber optic interferometer module, an ultra-small fiber optic lens and a calibration device. At present, although there are researches on ultra-small fiber optic lenses, dedicated fiber optic interferometer modules and sensor calibration devices, they are lacking. Combination use, especially the lack of ultra-small fiber optic lens and fiber optic interferometer module fusion integrated interferometric micro-displacement fiber optic sensor

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