Substrate processing equipment

A technology for processing equipment and substrates, applied in coating, gaseous chemical plating, metal material coating process, etc., can solve problems such as deterioration and uneven film characteristics, and achieve improved yield, increased film deposition rate, and volume Reduced effect

Active Publication Date: 2019-03-26
CHARM ENG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Moreover, the non-uniformity of the film can deteriorate the characteristics of various devices fabricated

Method used

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  • Substrate processing equipment
  • Substrate processing equipment
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Examples

Experimental program
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Embodiment Construction

[0032] Hereinafter, specific embodiments will be described in detail with reference to the accompanying drawings. However, this invention may be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the dimensions of layers and regions are exaggerated for clarity of illustration. Like reference numerals refer to like elements throughout.

[0033] figure 1 is a schematic cross-sectional view of a substrate processing apparatus according to an exemplary embodiment, and figure 2 A schematic cross-sectional view to illustrate the interior of a substrate support apparatus according to an exemplary embodiment.

[0034] see figure 1 and 2 , the substrate processing apparatus according to the exemplary embodiment includes: a chamber 100 thro...

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Abstract

The present invention relates to a substrate processing apparatus comprising: a chamber allowing a substrate to enter and exit on one side of the chamber and having a first space in the chamber; an inner chamber arranged inside the chamber in the first space of the internal chamber, and has a second space in the internal chamber; a substrate support arranged inside the internal chamber, the substrate support for supporting the substrate; and a gas injector for the Spraying gas on a substrate support, wherein the inner chamber comprises: a first body fixed on an upper portion of the interior of the chamber; a second body arranged below the first body, the second body being vertically movable and There is an exhaust hole in a central portion of the bottom surface of the second body; and an exhaust body connected to the exhaust hole and having an exhaust path inside the exhaust body. The technical scheme of the invention can manufacture a thin film with uniform thickness on the substrate. It is possible to have properties almost equal to or similar to each other, and the quality of the film can be improved.

Description

technical field [0001] The present invention relates to a substrate supporting device, and more particularly to a substrate processing device capable of uniformly and symmetrically adjusting environmental or process variables in a substrate processing space. Background technique [0002] Various electronic devices such as semiconductor memories are manufactured by stacking various thin films. That is, various thin films are formed on a substrate, and the formed thin films are patterned by using a photolithography process to form a device structure. [0003] Films can be classified into conductive films, dielectric films, and insulating films according to their materials, and are manufactured by various methods. Methods for manufacturing thin films can be mainly classified into physical methods and chemical methods. Recently, in order to efficiently manufacture thin films, a method of applying heat to a substrate during a manufacturing process or a method of using plasma is...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/205
CPCC23C16/4412C23C16/45565H01L21/205
Inventor 赵国衡
Owner CHARM ENG CO LTD
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