Sewage filtering treatment device based on gas detection function
A processing device and gas detection technology, applied in measurement devices, using sonic/ultrasonic/infrasonic waves to analyze fluids, and using sonic/ultrasonic/infrasonic waves for material analysis, etc., can solve problems that affect the normal operation of equipment and the personal safety of operators. , to achieve the effect of ensuring reliability, improving sensitivity, and enhancing sensing ability
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Embodiment 1
[0042] This application provides a sewage filtration treatment device based on the gas detection function, which includes a sewage filtration treatment device body and a monitoring CO installed inside the sewage filtration treatment device. 2 , NO 2 SAW sensor for gas concentration; such as figure 1 The schematic diagram of the SAW sensor structure is shown. The SAW sensor has a five-channel structure, wherein channel three is used as a reference channel, and the sensitive areas of channel one and channel two are coated with sensitive film material one (01) for CO 2 Gas detection; the sensitive area of channel 4 and channel 5 is coated with sensitive film material 2 (02) for NO 2 The detection of gas; the first and second sensitive film materials of the channel are three layers, and a layer of Ni film (03) is also magnetron sputtered between the sensitive film and the SAW device, and the thickness of the Ni film is 110nm; figure 2 show figure 1 The cross-sectional view o...
Embodiment 2
[0061] This application provides a sewage filtration treatment device based on the gas detection function, which includes a sewage filtration treatment device body and a monitoring CO installed inside the sewage filtration treatment device. 2 , NO 2 SAW sensor for gas concentration; such as figure 1 The schematic diagram of the SAW sensor structure is shown. The SAW sensor has a five-channel structure, wherein channel three is used as a reference channel, and the sensitive areas of channel one and channel two are coated with sensitive film material one (01) for CO 2 Gas detection; the sensitive area of channel 4 and channel 5 is coated with sensitive film material 2 (02) for NO 2 The detection of gas; the first and second channel sensitive film materials are three layers, and a layer of Ni film (03) is also magnetron sputtered between the sensitive film and the SAW device, and the thickness of the Ni film is 120nm; figure 2 show figure 1 The cross-sectional view of the c...
Embodiment 3
[0079] This application provides a sewage filtration treatment device based on the gas detection function, which includes a sewage filtration treatment device body and a monitoring CO installed inside the sewage filtration treatment device. 2 , NO 2 SAW sensor for gas concentration; such as figure 1 The schematic diagram of the SAW sensor structure is shown. The SAW sensor has a five-channel structure, wherein channel three is used as a reference channel, and the sensitive areas of channel one and channel two are coated with sensitive film material one (01) for CO 2 Gas detection; the sensitive area of channel 4 and channel 5 is coated with sensitive film material 2 (02) for NO 2 The detection of gas; the first and second channel sensitive film materials are three layers, and a layer of Ni film (03) is also magnetron sputtered between the sensitive film and the SAW device, and the thickness of the Ni film is 130nm; figure 2 show figure 1 The cross-sectional view of the c...
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Abstract
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