Method and device for the examination of a sample using optical projection tomography
一种光学投影断层、断层扫描的技术,应用在光学、光学元件、通过光学手段进行材料分析等方向,能够解决昂贵、显微镜无法灵活使用、麻烦等问题
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[0046] figure 1 An exemplary embodiment of a device 1 according to the invention is shown. The device comprises a light source 2 which may in particular be embodied as a laser. The light source 2 emits an illumination beam 3 which is deflected by a beam deflection device 4 which is adjustable for the deflection angle. After deflection, the illumination beam 3 travels through the scan lens 5 and the tube lens 6 , through the beam splitter 12 , and to the objective lens 7 which focuses the illumination beam 3 .
[0047] The beam deflecting device 4 is adjusted in such a way that the illuminating beam 3 passes through the objective pupil of the objective 7 at an inclination relative to the optical axis, so that it leaves the objective 7 eccentrically, i.e. with a transverse deviation relative to the optical axis of the objective 7 and then incident on the illumination light deflecting part 8, which deflects the illumination beam 3 to the sample preferably by about 90 degrees. ...
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