Discharging electrode used for capillary extreme ultraviolet photoetching light source
An extreme ultraviolet lithography and discharge electrode technology, which is applied to microlithography exposure equipment, parts of gas discharge lamps, optics, etc., can solve the problems of difficulty in meeting the requirements of fine-tuning of plasma length and difficulty in operation, and achieve optimization. Output, simple operation, and the effect of improving efficiency
Active Publication Date: 2016-08-24
黑龙江省工研院资产经营管理有限公司
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- Claims
- Application Information
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Problems solved by technology
[0005] The purpose of the present invention is to solve the problem that it is difficult to meet the requirements of plasma length fine-tuning and the operation is difficult by replacing capillary tubes of different lengths in the process of generating extreme ultraviolet light by using the capillary discharge Z-pinch method, thus proposing A discharge electrode for capillary extreme ultraviolet lithography light source
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specific Embodiment approach 1
[0022] Specific implementation mode one: combine Figure 1 to Figure 6 Describe this embodiment, a discharge electrode for a capillary extreme ultraviolet lithography light source described in this embodiment, including a pre-discharge electrode 1, a main discharge electrode 2, a lock nut 3, a pressure ring 4 and a terminal 5;
[0023] The pre-discharge electrode 1 is a cylindrical structure with a height of 20 mm, an outer diameter of 10 mm, and an inner diameter of 5.56 mm. The inner surface of one end of the cylindrical structure is provided with a thread with a length of 9 mm and a size of M6×0.5. The outer surface of one end is provided with a thread with a length of 3 mm and a size of M10×0.75;
[0024] One end of the main discharge electrode 2 is a cone 6, the middle part is a No. 1 cylinder 7, and the other end is a No. 2 cylinder 8. The cone 6, No. 1 cylinder 7 and No. 2 cylinder 8 are coaxial and fixedly arranged. The height of body 6 is 4.3 millimeters, and the dia...
specific Embodiment approach 2
[0030] Embodiment 2: This embodiment is a further limitation of the discharge electrode used in the capillary extreme ultraviolet lithography light source described in Embodiment 1. The fifth cylinder 12 is welded to the wire.
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Abstract
The invention discloses a discharging electrode used for a capillary extreme ultraviolet photoetching light source, belongs to the technical field of the extreme ultraviolet photoetching light source, and solves the problems of difficulty in satisfying the requirements of plasma length fine tuning and high operational difficulty existing in the extreme ultraviolet generation process by a capillary discharging Z pinching method when a way of replacing the capillaries of different lengths is adopted. The discharging electrode used for the capillary extreme ultraviolet photoetching light source provided by the invention comprises a discharging electrode, a main discharging electrode a locking nut, a pressing ring and a terminal, wherein a pre-discharging electrode adopts a cylindrical structure; a cone is arranged at one end of the main discharging electrode, a cylinder I is arranged in the middle, and a cylinder II is arranged at the other end of the main discharging electrode; the terminal is fixedly arranged in a concave hole which is formed in one bottom surface of the cylinder II through the pressing ring; one bottom surface of the cylinder II is taken as the end plane of one end of the cylinder II, while the other end of the cylinder II is arranged in the cylindrical structure; and the cylinder II and the cylindrical structure are in threaded connection, and are fixed through the locking nut. The discharging electrode provided by the invention is applicable to the capillary extreme ultraviolet photoetching light source.
Description
technical field [0001] The invention relates to a capillary discharge electrode, which belongs to the technical field of extreme ultraviolet lithography light sources. Background technique [0002] In the process of using the capillary discharge Z-pinch method to generate extreme ultraviolet light, the length of the plasma in the Z-pinch state determines its own impedance characteristics, and the length of the plasma in the Z-pinch state is equal to the the distance between the two electrodes; [0003] The third stage of the main discharge power pulse compression discharges to the capillary and the energy release efficiency is proportional to the matching degree of the impedance characteristics of the plasma in the capillary and the third stage of the main discharge power pulse compression. Therefore, when the device is connected, it is often necessary fine-tuning the length of the plasma so that its impedance characteristics more closely match those of the third stage of t...
Claims
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Patent Timeline
Login to View More IPC IPC(8): H01J61/06G03F7/20
CPCG03F7/2004H01J61/06
Inventor 徐强赵永蓬王骐
Owner 黑龙江省工研院资产经营管理有限公司