Array substrate manufacturing method, array substrate and display device
A manufacturing method and array substrate technology, applied in semiconductor/solid-state device manufacturing, electrical components, electrical solid-state devices, etc., to achieve the effects of improving negative bias stress tolerance, maintaining tolerance, and ensuring reliability
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[0044] In order to make the object, technical solution and advantages of the present invention clearer, the implementation manner of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0045] see figure 1 , an embodiment of the present invention provides a manufacturing method of an array substrate, the manufacturing method comprising:
[0046] Step 101 : forming an oxide active layer on a base substrate, where the base substrate includes a display area and a non-display area.
[0047] Step 102: forming a photoresist layer on the oxide active layer.
[0048] Step 103: forming an active layer pattern.
[0049] Step 104: removing the photoresist layer in the display area.
[0050] Step 105: performing plasma surface treatment on the oxide active layer in the display area, so as to increase the oxygen content in the oxide active layer in the display area.
[0051] When performing plasma surface treatment on the oxid...
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