A piezoelectric strain combined micro-vibration measuring device
A measuring device and combined technology are applied in the field of force sensors to achieve the effects of improving reliability, increasing sensitivity and high integration.
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[0031] Below in conjunction with accompanying drawing and specific embodiment the present invention is described in further detail:
[0032] The technical solution adopted by the present invention to solve the technical problem is: a piezoelectric strain combined micro-vibration measuring device, the measuring frequency of which can cover 0-1000 Hz.
[0033] Such as figure 1 Shown is a structural schematic diagram of a piezoelectric strain combined micro-vibration measuring device. It can be seen from the figure that a piezoelectric strain combined micro-vibration measuring device includes a chassis 1, a piezoelectric strain combined force sensor 2 and a table 3; wherein the chassis 1 is located at the bottom ; The piezoelectric strain combined force sensor 2 is fixedly installed on the upper surface of the chassis 1; the table 3 is fixedly installed on the upper surface of the piezoelectric strain combined force sensor 2;
[0034] Such as figure 2 Shown is a schematic diag...
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