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Method and device for Z-axis perpendicularity error measurement based on image measurement

A technology of image measurement and error measurement, which is applied to measurement devices, optical devices, instruments, etc., can solve the problems of Z-axis perpendicularity error of the measuring machine and the influence of the measurement accuracy of the coordinate measuring machine.

Inactive Publication Date: 2016-10-05
TIANJIN UNIV
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Problems solved by technology

Due to the limitations of the manufacturing and installation process and other conditions, there will inevitably be verticality errors on the Z axis of the measuring machine
During the measurement process, this error will have a direct impact on the measurement accuracy of the coordinate measuring machine

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  • Method and device for Z-axis perpendicularity error measurement based on image measurement

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Embodiment Construction

[0023] The method and device for measuring the Z-axis perpendicularity error based on image measurement of the present invention will be described in detail below in conjunction with the embodiments and the accompanying drawings.

[0024] The method for measuring the Z-axis perpendicularity error based on image measurement of the present invention proposes a method for measuring the position of the light spot by using the image, the purpose of which is to obtain a universal Z-axis perpendicularity error fast Detection method.

[0025] The Z-axis perpendicularity error measurement method based on image measurement of the present invention comprises the following steps:

[0026] 1) Use the position change of the spot height of the laser on the receiving target to obtain an ideal light beam parallel to the surface of the workbench; including:

[0027] (1) Use a laser to emit a laser beam parallel to the surface of the worktable, place a receiving target (CCD, PSD) in the optical...

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Abstract

The invention discloses a method and a device for Z-axis perpendicularity error measurement based on image measurement. The method comprises steps: by using spot height position changes of laser on a receiving target, a beam of light parallel with the surface of a working table is acquired; the already-adjusted laser is incident to a 45-DEG turning mirror, and a beam of light perpendicular to the surface of the working table is acquired; emergent light from the 45-DEG turning mirror irradiates on a mask located at the object distance focal plane of an image measurement lens and a spot is formed, wherein the image measurement lens is fixed on a to-be-measured Z axis; the spot position on the mask acquired by the image measurement lens is measured and recorded; when the image measurement lens moves along with the to-be-measured Z axis, the spot position on the mask remains unchanged, and the to-be-measured Z axis is in a perpendicular state relative to the working table; and when the spot position on the mask changes, perpendicularity errors exist to the to-be-measured Z axis relative to the working table, and the perpendicularity errors of the to-be-measured Z axis are obtained. Thus, Z-axis perpendicularity error verification can be quickly, accurately and conveniently completed.

Description

technical field [0001] The invention relates to a verticality error measurement of a coordinate measuring machine. In particular, it relates to a method and device for measuring Z-axis verticality error based on image measurement, which contains or can be placed with an image measuring head. Background technique [0002] A coordinate measuring machine is an efficient precision measuring instrument that has been widely used in industries such as machinery manufacturing, aerospace, electronics and automobiles. Due to the limitations of the manufacturing and installation process and other conditions, there will inevitably be verticality errors in the Z-axis of the measuring machine. During the measurement process, this error will have a direct impact on the measurement accuracy of the coordinate measuring machine. Therefore, it is of great significance to measure the perpendicularity error of the Z-axis of the coordinate measuring machine. Perpendicularity error evaluates th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/26
CPCG01B11/26
Inventor 付鲁华王祎雯王仲赵炎文信
Owner TIANJIN UNIV
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