Thin-wall part machining error measuring device and thin-wall part machining error measurement method based on spatial light modulator

Abstract

The invention relates to a thin-wall part machining error measuring device and a thin-wall part machining error measurement method based on a spatial light modulator. The surface error measurement of a machined thin-wall part is contact measurement generally; during the measurement, the surface of the part is in contact with the measuring device, and the movement speed during the measurement is relatively low, so a microcosmic pit which has smaller curvature radius than a measuring head cannot be measured. The thin-wall part machining error measuring device disclosed by the invention comprises a group of measuring devices (14); each measuring device comprises a sleeve (1); the upper part of each sleeve is connected with a supporting device (9) through a bolt; the two ends of each supporting device are respectively connected with two modulator clamping devices (2) through connecting shafts; a left liquid crystal spatial light modulator (3) and a right liquid crystal spatial light modulator (8) are respectively mounted inside the modulator clamping devices; polarizing films (7) are separately mounted at the inner surfaces of the left liquid crystal spatial light modulator (3) and the right liquid crystal spatial light modulator (8); a digital phase-shift interferometer (6) is mounted at the upper portion of the corresponding sleeve through a square groove. The measurement method disclosed by the invention is applied to the thin-wall part machining error measuring device based on the spatial light modulator.

Description

Technical field: [0001] The invention relates to the field of optics, in particular to a device and method for measuring machining errors in machined surfaces and measuring the surface quality of thin-walled parts. Background technique: [0002] At present, the surface machining error measurement of the thin-walled curved surface (impeller blade) in CNC machining usually adopts contact measurement. During the measurement, because it moves on the surface of the thin-walled curved surface (impeller blade), the measurement speed is slow. On the one hand, it is difficult to measure less than the measurement The error of the microscopic pit of the head curvature radius, on the other hand, easily deforms the surface of the thin-walled curved surface under force, so it cannot be applied to real-time online detection; [0003] The device adopts non-contact measurement to measure the thin-walled curved surface on the premise of not touching the measured thin-walled parts, which can p...

AI Technical Summary

Problems solved by technology

[0002] At present, the surface machining error measurement of the thin-walled curved surface (impeller blade) in CNC machining usually adopts contact measurement. During the measurement, because it moves on the surface of the thin-walled curved surface (impeller blade), the measurement speed is slow. On the one hand, it is difficult to measure less than the measurement The error of the microscopic pit of the head curvature radius, on the other hand, easily deforms the surface of the thin-walled curved surface under force, so it cannot be applied to real-time online detection;

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