60 results about "Liquid crystal spatial light modulator" patented technology

The invention discloses a light spot shaping device based on wave plate polarization conversion and a use method, and relates to the technical field of laser processing, the device divides random polarized light into S / P light through a first polarization beam splitter (PBS), converts the S light into P light through a first 1 / 2 wave plate, modulates the S light through a conventional silicon-based liquid crystal spatial light modulator (LCoS SLM), and converts the P light into the S light through a second 1 / 2 wave plate. And the beams are combined by the second PBS. The method comprises the steps of light splitting, polarization conversion, phase modulation, beam combining, beam expanding and focusing and the like. The double 1 / 2 wave plates are combined with the conventional PBS, the laser energy utilization rate is higher than 85%, commercial SLM equipment is adapted, the machining efficiency of the shaped annular light spots is remarkably improved compared with that of Gaussian beams, the method is suitable for laser welding and metal 3D printing, and the problems of energy waste and high cost are solved.

A super-resolution microscopic imaging method and apparatus based on common-path parallel fluorescence emission difference microscopy. In the method, a liquid crystal spatial light modulator is used to modulate excitation light in fluorescence emission difference microscopy super-resolution microscopic imaging, and two parts of the spatial light modulator are respectively loaded into 0-2π vortex phase modulation and blazed grating, so that the common-path excitation light forms solid spot and doughnut-shaped spot with a certain distance on a sample surface at the same time, and parallel scanning is carried out, thereby ensuring that the imaging speed is doubled compared with that of ordinary fluorescence emission difference super-resolution microscopic imaging, and at the same time, the two excitation lights are not easily affected by noise, drift and other interferences due to the common path.

The application relates to the technical field of photographic light source control, and discloses a soft light control method and a mobile terminal, wherein the soft light control method comprises the following steps: constructing a four-dimensional light field harmonic model, decomposing a target light effect into a time-space harmonic combination; decomposing the target light effect into a time-space mapping sequence to form light field microstructure control parameters; combining a micro-electro-mechanical system programmable reflection array and a liquid crystal spatial light modulator, cooperating with a multi-channel LED array to realize sub-millimeter light distribution control and microsecond light field dynamic reconstruction; establishing an accurate synchronization mechanism of a shooting device shutter and light effect change; providing a light effect animation programming interface based on key frames, supporting the definition of a dynamic change sequence of light trajectory, intensity and form; and through the fusion of microstructure light field control and time-space harmonic analysis, four-dimensional dynamic light sculpture is realized, and the technical problem that a traditional soft light control method can only adjust overall brightness and color temperature is solved.

The invention provides an integratable wide spectrum dense channel WSS based on a liquid crystal spatial light modulator, and the method comprises the steps: taking an axial symmetry AWG array as an input port / output port of the WSS, carrying out the dispersion of an input WDM signal, and carrying out the wave combination of an output optical signal; the polarization control module is used for converting the WDM signal into two beams of linearly polarized light in a single polarization state; the grating is used for dispersing linearly polarized light in the WDM signal along the x direction; the lens group is used for realizing polarization multiplexing in an x-z plane, converting offset of different angles into off-axis displacement to realize angle-space displacement conversion, and controlling the spot size through a 1: 1 4f system in a y-z plane; the spatial light modulator is used for carrying out pure phase wavefront modulation on optical signals, so that light with different wavelengths deflects at different angles in the x direction and returns along the same path in the y direction, and the problem that it is difficult for a WSS of a liquid crystal spatial light modulator to simultaneously achieve a wide working frequency spectrum covering a communication waveband and ultra-dense channel intervals lower than 50 GHz is solved.

The invention discloses a method and device for modulating random polarized light through a liquid crystal spatial light modulator, and relates to the technical field of light field regulation and control. The device comprises a laser, a two-in-one optical fiber, a beam expander, a polarization beam splitter (PBS), a 1 / 2 wave plate, an optical fiber coupler, a polarization maintaining optical fiber, a liquid crystal spatial light modulator and other core components, wherein the liquid crystal spatial light modulator is reflective or transmissive. According to the method, random polarized light is divided into parallel and vertical polarized light components through a PBS, the vertical polarized light is converted by a 45-degree 1 / 2 wave plate and then is transmitted by a polarization maintaining optical fiber and is converged with the original parallel polarized light component, or the vertical polarized light is directly used for preheating a sample to be processed, and the converged single beam of parallel polarized light is modulated by a liquid crystal spatial light modulator. Single-beam modulation is achieved, high-power large light spot application is adapted, the hologram manufacturing difficulty is lowered, the light path structure is simplified, light energy loss is reduced, and the device is suitable for 3D metal printing, laser welding and other scenes.

The invention discloses an optical phased array transmitting system based on end face emergence. The optical phased array transmitting system comprises an antenna array composed of tip Si waveguides and a concave reflector based on a liquid crystal spatial light modulator. An SOI substrate in the antenna array comprises a substrate silicon layer and a buried oxide layer, a Si waveguide layer is located above the buried oxide layer and used for transmitting a light field, and the upper layer is covered with SiO2; similar cylindrical Fresnel lens phase distribution is applied to the LCOS-SLM liquid crystal spatial light modulator, so that the condensation performance similar to that of a cylindrical concave reflector is formed, and the longitudinal divergence angle of an emergent beam is reduced. Tip processing is carried out on the tail end of the Si waveguide, the emission efficiency is improved by introducing gradual change of the effective refractive index, meanwhile, an end face emission optical phased array antenna array is formed, the transverse light beam scanning capacity is achieved, deflection of different degrees is generated based on the main optical axis of the concave reflector, the longitudinal angle of reflected light is changed, and the reflection efficiency is improved. Therefore, the longitudinal scanning of the light beam is realized.

The present invention provides a pixel-level full-vector, full-range polarization control device, comprising: an aperture, a radial polarization converter, a first phase-type liquid crystal spatial light modulator, a second phase-type liquid crystal spatial light modulator, a PC control terminal, a converging lens, and a polarization camera. Specifically, the aperture, the radial polarization converter, the first phase-type liquid crystal spatial light modulator, the second phase-type liquid crystal spatial light modulator, the converging lens, and the polarization camera are arranged in sequence along the horizontal direction and share a common rotational symmetry axis. The present invention relates to the technical field of vector light beam polarization control. The pixel-level full-vector, full-range polarization control device of the present invention can achieve full-range polarization control of the ellipticity angle [‑π / 4, π / 4] and the azimuth angle [‑π / 2, π / 2] for light incident in any polarization state.

The present invention discloses a method for analyzing polarized image information, a system, an electronic device, and a computer-readable storage medium. These methods, which fall within the field of optics, primarily target materials exhibiting birefringence. By comprehensively considering all factors, including the light source, material absorption / emission, birefringence, and the provision of additional optical path difference devices in the optical path, the method reproduces the sample's color and texture, revealing the material's optical properties and molecular arrangement characteristics. These methods, including optical index, birefringence, color, and molecular director distribution, provide quantitative analysis tools for polymer crystallization / orientation, liquid crystal texture analysis, and biofilm analysis. These methods can be applied to material microstructure and performance studies, including analysis of color distortion caused by design flaws in liquid crystal displays, liquid crystal spatial light modulators, and active-matrix organic light-emitting diode displays. Furthermore, in the production of polymer materials using stretching processes, this method can also monitor and analyze properties such as the order parameter and birefringence of oriented polymers in real time.

The application provides a laser communication scanning precision improving method, which comprises the following steps: before using a liquid crystal spatial light modulator, calibrating and adjusting the liquid crystal spatial light modulator in a simulated use environment to obtain a mapping relationship between a deflection angle error of the liquid crystal spatial light modulator in the use environment and a compensation parameter; reflecting a laser beam by using the liquid crystal spatial light modulator to form a first light beam; splitting the first light beam by using a beam splitting block to form a second light beam reflected in the beam splitting block and a third light beam transmitted through the beam splitting block; reflecting the third light beam to the beam splitting block by using a corner cube and reflecting the third light beam by the beam splitting block to form a fourth light beam; processing the fourth light beam by using a coupling mirror group and collecting the fourth light beam by using a camera to determine the deflection angle of the fourth light beam in real time and control the deflection angle of the second light beam. The application can control the deflection direction of the liquid crystal spatial light modulator in real time and improve the scanning precision of the laser communication.

Disclosed in this disclosure is a method for super-resolution microscopic interferometric measurement based on broadband annular radially polarized light, where a broad-spectrum light source with an extended surface is selected; uniform illumination covering a to-be-tested FOV and having a certain aperture angle is provided using a Kohler illumination system; a two-stage relay system is designed, and amplitude and polarization of a full-FOV beam is modulated by a liquid crystal spatial light modulator and a vortex waveplate; broadband annular radially polarized light is focused based on the extended surface light source and a microscopic objective lens with a high numerical aperture to implement super-resolution microscopic interference imaging of a sample; and super-resolution topography measurement directed at a surface of a microstructure is implemented combined with phase-shifting interferometry.

The application provides a high-speed three-dimensional reconstruction system and method based on two-stage cooperative coding, which comprises a parallel light source module, a liquid crystal spatial light modulator, a 4f relay system, a digital micromirror device, a projection lens, a sparse light field sampling module and an edge computing device; parallel light beams output by the parallel light source module are transmitted to the digital micromirror device for high-speed binary processing through the 4f relay system after phase modulation, so that a structured light field modulated in phase and amplitude is formed; the projection lens projects the modulated light field to a measured surface of a workpiece, and the reflected light field of the workpiece is captured by the sparse sampling module and then compressed; the edge computing device dynamically adjusts parameters of the liquid crystal spatial light modulator, the digital micromirror device and the sparse light field sampling module according to real-time feedback, so as to optimize the adaptability of the structured light field to the surface characteristics; finally, the surface topography is accurately reconstructed through a three-dimensional reconstruction network, and the core problem that speed, precision and data volume cannot be simultaneously achieved is solved.

The application discloses a vortex spectrum dark field microscopic measurement device and method based on vortex quantum correlation, which comprises an entangled light source generation module, a sample illumination detection module and a vortex spectrum extraction module; the entangled light source generation module sequentially comprises a laser, a half-wave plate, a BBO crystal, a low-pass filter and a non-polarization beam splitter one in the light propagation direction; the sample illumination detection module sequentially comprises a single-mode optical fiber one, a tube lens one, an objective lens one, a sample to be measured, an objective lens two, a tube lens two, a lens one, a lens two, a single-mode optical fiber two and a SPAD detector one in the light propagation direction; and the vortex spectrum extraction module sequentially comprises a mirror one, a mirror two, a liquid crystal spatial light modulator one, a lens three, a lens four, a single-mode optical fiber three and a SPAD detector two in the light propagation direction.

The invention discloses a terahertz liquid crystal spatial light modulator with large modulation depth and ultra wide band, which belongs to the field of novel artificial electromagnetic materials and terahertz science and comprises an upper-layer quartz substrate, an upper-layer metal grating, an upper-layer pre-oriented film, a liquid crystal layer, a lower-layer pre-oriented film, a lower-layer metal grating and a lower-layer quartz substrate which are sequentially stacked and arranged, the upper-layer metal grating and the lower-layer metal grating are orthogonally arranged in space to form a Fabry-Perot cavity; the liquid crystal layer is filled between the upper pre-oriented film and the lower pre-oriented film, and the liquid crystal director has in-plane pre-orientation; the upper-layer metal grating and the lower-layer metal grating serve as a first electrode and a second electrode respectively and are used for receiving external voltage and controlling the liquid crystal director to be dynamically switched between an in-plane state and an out-of-plane state; according to the invention, the spatial modulation of the incident terahertz wave intensity can be realized, and the problems of photoelectric function conflict and pixel crosstalk of a metal structure are effectively solved.

The invention discloses a light spot shaping device and method based on partition modulation and a customized polarization element, and relates to the technical field of laser processing, random polarized light is divided into S / P light through a 42.5-degree customized polarization beam splitter (PBS), the S / P light is emitted to a partition silicon-based liquid crystal spatial light modulator (LCoS SLM) in parallel through a total reflection surface, the liquid crystal orientation difference of A / B regions is 90 degrees, independent modulation is achieved, and the light spot shaping device and method based on the partition modulation and the customized polarization element are obtained. And combining the light beams by using a P reflection type polarization beam splitter (R-PBS) and ensuring that the optical path is consistent. The method comprises the steps of beam expansion, light splitting, partition modulation, light beam combination, secondary beam expansion focusing and the like. According to the scheme, the energy utilization rate is close to 100%, the method is suitable for lasers of 50 W or above, the machining efficiency of the shaped annular light spots is improved by two times or above compared with Gaussian beams, the temperature gradient is reduced, the method can be used for laser welding and metal 3D printing, and the problems of energy waste, heat effect and insufficient precision are solved.

The application discloses an imaging optical system and an imaging method, the system comprising a controller and sequentially arranged front mirror group, spatially tunable component, rear mirror group and imaging detector; the spatially tunable component is located on a primary image plane and comprises sequentially arranged first polarizer, liquid crystal spatial light modulator and second polarizer; the first polarizer is used for polarizing natural light emitted by a target object to obtain polarized light; the liquid crystal spatial light modulator is used for phase modulating the polarized light of a target coordinate region to obtain phase modulated light; the second polarizer is used for detecting the phase modulated light to obtain amplitude modulated light; and the imaging detector is used for receiving a target image corresponding to the amplitude modulated light. The system firstly performs phase modulation on incident light through the spatial light modulator, and then realizes amplitude modulation through the second polarizer, so that the dynamic range of the system is greatly improved; and the system can also realize one-time modulation of light intensity at different spatial positions of a light field, so that the modulation efficiency is improved.

The invention relates to a spectrum processing system, a processing method and a medium, and relates to the technical field of optical signal processing, the system comprises an optical front end, a relay lens group, a dispersion element and a beam splitter which are arranged in sequence, and the beam splitter divides a light beam from the dispersion element into a first light beam and a second light beam; the liquid crystal spatial light modulator is arranged on a light path of the first light beam, has a polarization-independent characteristic, and is used for performing phase and / or amplitude modulation processing on different wavelength components of the first light beam and reflecting the processed light beam along an original light path so as to output the light beam through the optical front end; the spectrum detector is arranged on a light path of the second light beam and used for receiving the second light beam and detecting spectrum power distribution of the second light beam to obtain spectrum information, and the high-precision spectrum detection and spectrum processing integrated function is achieved.

Method of manufacture, involving flip chip bonding and apparatus for Liquid Crystal on Silicon [LCOS] Spatial Light Modulator (SLM) [Fig. 17; 550], comprising: Substrate comprising first and second op

The application provides a liquid crystal optical phased array imaging system and a design method thereof, and belongs to the technical field of liquid crystal optical phased arrays; the system comprises a camera, a lens, a light splitting prism, a liquid crystal spatial light modulator, a superlens and a computer, and is suitable for a visible light waveband; non-mechanical beam deflection is realized through the liquid crystal spatial light modulator, angle amplification and dispersion compensation functions are realized in combination with the superlens, the problems of large volume and short service life of traditional mechanical beam deflection technology are solved, and the imaging aliasing problem caused by the small angle range of the existing liquid crystal optical phased array and dispersion is solved; the superlens adopts a three-layer nano structure unit stacking design, the upper layer is a dispersion compensation structure, and the lower layer is an angle amplification structure; through phase modulation, large-angle imaging and efficient utilization of the spectrum are realized; the application has the advantages of compact structure, small volume, low cost, high stability and the like, and is suitable for fields such as laser radar, space optical communication and infrared tracking.

The invention relates to a high-energy pulse laser system based on space-time mode locking, which belongs to the technical field of optoelectronic equipment and is structurally characterized in that the output end of a seed pulse source is connected with the input end of a preprocessing module, and the output end of the preprocessing module is connected with the input end of an energy amplification module; and the output end of the energy amplification module is connected with the input end of the spectrum moving module. The phase step refractive index multimode fiber is used as a gain fiber, the gradient refractive index multimode fiber is used as a passive fiber to construct the space-time mode-locked fiber laser, and the liquid crystal spatial light modulator is used for designing a programmable pulse shaping structure to carry out intracavity high-order dispersion management, so that pure four-time space-time mode-locked pulse output is realized; the pure quartic space-time mode-locked pulse has the advantages of high energy, high power, narrow pulse width and the like. And high-energy ultra-short ultraviolet pulses are obtained through further energy amplification and spectrum shifting, and the method is suitable for industrial precise cold machining.

The invention discloses a high-power laser dynamic shaping device based on light beam segmentation and recombination, and relates to the technical field of high-power laser optics and light beam control, and the high-power laser dynamic shaping device sequentially comprises a high-power laser emission unit, a light beam segmentation unit, a composite phase regulation and control array, a closed-loop feedback control unit and a light beam recombination unit along the light path propagation direction. High-power laser is directly subjected to'segmentation-processing-reduction ', an expensive gain medium is removed, the nonlinear effect in the high-power amplification process is avoided, the system cost and size are greatly reduced, and the large-aperture liquid crystal spatial light modulator is suitable for solving the problems that a single large-aperture liquid crystal spatial light modulator is low in damage threshold, difficult to manufacture and poor in heat dissipation. An array formed by a plurality of small-size liquid crystal spatial light modulators is innovatively adopted, in a phase modulation link, inherent static aberration of a system is smoothed in advance by utilizing a static element, and real-time high-frequency noise suppression and wavefront shaping are focused on by utilizing the liquid crystal spatial light modulators.

The invention discloses a light spot shaping device efficiently adaptive to laser equipment and a using method, and relates to the technical field of laser processing. The device comprises a fiber laser, a beam expander, a polarization beam splitter, a 1 / 2 wave plate, a reflector group, a phase type silicon-based liquid crystal spatial light modulator, two sets of 4f optical modules, two sets of scanning galvanometer modules and two sets of field lenses. Random polarized light is divided into S polarized light and P polarized light through a polarization beam splitter, the S polarized light is converted into the P polarized light through a 1 / 2 wave plate, the two beams of polarized light can both enter a silicon-based liquid crystal spatial light modulator for phase modulation, and Gaussian beams are shaped into non-Gaussian beams; double-optical-path parallel design is adopted, the two sets of optical paths share one optical fiber laser and one silicon-based liquid crystal spatial light modulator, and modulated light beams act on a processing material after being subjected to beam expansion or beam contraction through the 4f optical module, path control through the scanning galvanometer module and field lens focusing. According to the scheme, the problem of laser energy waste is effectively solved, and industrial machining requirements are met.

The application discloses a kind of spot shaping device and method based on partition modulation and custom polarized element, it is related to laser processing technical field, by 42.5 degree custom polarized beam splitter (PBS) random polarized light is divided into S / P light, makes both parallel to the partition silicon-based liquid crystal spatial light modulator (LCoS SLM) by total reflection surface, its A / B area liquid crystal orientation difference 90 degrees realizes independent modulation, again using P reflection polarized beam splitter (R-PBS) light beam and guarantee optical path consistent is combined.This method includes expansion, light splitting, partition modulation, light beam merging and secondary expansion focusing etc..The scheme realizes close to 100% energy utilization, it is applicable to more than 50W laser, the processing efficiency of annular light spot after shaping is higher than Gaussian beam 2 times or more, temperature gradient reduces, can be used for laser welding and metal 3D printing, solve the problem of energy waste, heat effect and insufficient precision.

The invention discloses a micropore chamfer machining device and method based on an adjustable Airy beam, and belongs to the technical field of laser precision machining.The micropore chamfer machining device comprises a light source module, a beam modulation module and a beam scanning module, and the light source module is used for outputting a laser beam; the light beam modulation module comprises a liquid crystal spatial light modulator and a regulation and control assembly, the laser beam is modulated into an Airy beam through the liquid crystal spatial light modulator, and the regulation and control assembly loads different phase holograms to the liquid crystal spatial light modulator to regulate and control the Airy beam; the light beam scanning module comprises a high-speed two-dimensional scanning assembly and a bearing platform, the bearing platform is used for bearing a to-be-machined part, the Airy light beam is emitted to the to-be-machined part through the high-speed two-dimensional scanning assembly, and the high-speed two-dimensional scanning assembly is used for driving the Airy light beam to conduct scanning along a preset track so as to conduct chamfering machining on the to-be-machined part; therefore, the machining efficiency and the machining quality of the micropore chamfering can be improved.

This invention discloses a method for controlling the intensity of a multifocal array in a liquid crystal spatial light modulator, relating to the field of light field manipulation technology. The method includes: dividing the entrance pupil region into several sector regions with the center of the objective lens as the vertex, and assigning specific phase values ​​to each sector region to obtain a multifocal phase map; loading the multifocal phase map onto the spatial light modulator for phase modulation, and after entrance pupil phase encoding of the objective lens, obtaining a multifocal array on the focal plane; using image processing methods to calibrate the relationship between the central angle of the phase segmentation region and the light intensity distribution of the multifocal array; adjusting the central angle parameter of the phase segmentation region according to the relationship between the central angle and the light intensity distribution to control the light intensity distribution of the multifocal array; setting the corresponding phase distribution to obtain a multifocal array with controllable intensity distribution, focal position, and morphology. This invention provides efficient calculation for controlling the light intensity distribution of the multifocal array, enabling the acquisition of a multifocal array with controllable intensity, position, and morphology.

The invention relates to a liquid crystal material for an ultraviolet band as well as a preparation method and application thereof, and belongs to the technical field of preparation of liquid crystal materials. According to the liquid crystal material for the ultraviolet band, the liquid crystal material is designed by selecting groups which do not generate light absorption and light reaction in the band of 300-400 nm, the liquid crystal material is an ultraviolet-resistant liquid crystal material which does not generate light absorption and light reaction in the ultraviolet band, and a general formula and application suitable for forming the liquid crystal material are provided. The liquid crystal material has very high stability in the wave band of 300-400 nm. The liquid crystal material disclosed by the invention is mainly applicable to the fields of fast spatial light modulators and the like, such as light polymerization type 3D printing of liquid crystal spatial light modulators and the like.

The invention discloses a novel liquid crystal spatial light modulator and a use method, relates to the technical field of spatial light modulation, and aims to solve the problems of poor real-time performance, insufficient high-frequency phase distortion compensation, dependence on accurate wavefront detection and the like caused by the fact that an existing liquid crystal on silicon (LCOS) spatial light modulator depends on software algorithm compensation. The modulator comprises a reflection type LCOS device and a transmission type phase compensation layer, the LCOS comprises a CMOS silicon-based backboard, an electrode layer, a liquid crystal layer and other structures, and the phase compensation layer is fixed on the surface of the LCOS device. The application method comprises the following steps: establishing a gray-phase curve through an orthogonal polarization method, obtaining initial phase distribution through a phase shift interference method, and preparing a physical compensation layer through laser direct writing or voltage control to realize phase regulation and control combining physics and an algorithm. Complexity of a compensation algorithm is reduced, light field regulation and control precision and efficiency are improved, and the method is suitable for the fields of holographic display, all-optical communication and the like.

The application discloses an optical diffraction tomography imaging device and method based on an integrated quantitative phase imaging camera, and mainly solves the technical problems of mechanical vibration, poor stability, low measurement precision, limited imaging field of view and the like of the current optical diffraction tomography device. The application realizes multi-angle rotary illumination without mechanical movement by loading a blazed phase grating with different directions and periods of pixel numbers on a reflective liquid crystal spatial light modulator; uses the integrated quantitative phase imaging camera to record the point array interference diagram of a non-marked transparent sample under different illumination angles, then processes the four-wave shearing interference point array diagram by using a Fourier transform method, and inversely calculates the light field complex amplitude distribution of the sample under different illumination angles; finally, based on the optical diffraction tomography principle, the three-dimensional refractive index distribution of the sample is quantitatively reproduced from the obtained multi-angle complex amplitude sequence, the micro three-dimensional structure distribution inside the transparent sample is observed without marking, and high-precision three-dimensional imaging is realized.

The application discloses a preparation method of a reflective curved fork surface grating. The grating prepared by the method is a pure phase grating and can be used for generating perfect vortex light (POV). A high-order Bessel Gaussian beam is interfered with a Gaussian beam to expose a photosensitive material on a substrate, wherein the high-order Bessel Gaussian beam is generated by a reflective pure phase liquid crystal spatial light modulator (SLM), and after development and metal film plating, the reflective curved fork surface grating is prepared. When a Gaussian light of a base mode is used for irradiation, the POV can be obtained on a far field or a lens focal plane in a first-order diffraction direction. The method for obtaining the POV by using the reflective curved fork surface grating has the advantages of a higher damage threshold, a wider working wavelength range and a higher conversion efficiency, and has the advantages of simple structure, low cost and mass production, and has an important prospect in generation of high-power POV and can be used in the fields of optical manipulation and optical processing.

The application relates to a low-dielectric-constant-material slotting system and method based on a spatial light modulator, which comprises a laser, a liquid crystal spatial light modulator, an optical path transmission system and a workbench; the laser is used for emitting a laser beam; the optical path transmission system transmits a main machining light beam to the liquid crystal spatial light modulator for shaping, outputs and focuses the shaped laser beam on the surface of a machined material on the workbench, sequentially forms double-fine-line light spots and multiple strip light spots to successively machine the surface of the machined material, and the energy and the focal plane position are both in a stepped distribution, so that grooves are finally formed on the surface of the machined material. The double-fine-line grooves formed by double-fine-line light spots can effectively isolate the thermal influence of subsequent multiple strip light spot etching, ensure the slotting precision, the spatial light modulator has high diffraction efficiency, greatly improves the energy utilization rate, and the spatial light modulator is flexible in modulation and can flexibly switch the double-fine-line and multiple strip light spots and the width and quantity of the multiple strip light spots according to different requirements.

The invention discloses an LCoS holographic focusing microscope system and a microscope automatic focusing method. The system comprises a light source module, a polarization control module, a relay module, a microscopic focusing module, an imaging module and an image analysis and feedback control module. Incident light is irradiated to the reflective liquid crystal spatial light modulator after being subjected to polarization control; through a 4f relay system formed by the first lens and the second lens, the phase modulation wavefront conjugate is transmitted to the rear aperture of the objective lens, thereby realizing the electronic adjustment of the equivalent focal length of the sample plane. A sample reflected or scattered light forms a sample image on the camera through the objective lens and the imaging lens, and the image analysis module updates the phase distribution of the reflective spatial light modulator in real time based on an image definition evaluation result, so that closed-loop automatic focusing control is formed. And rapid automatic focusing can be realized without mechanically moving an objective lens or a sample. The method has the advantages of being high in response speed, free of mechanical vibration and high in wavefront regulation and control precision, and is suitable for various application scenes.