Confocal transverse scanning device and method based on reflection type liquid crystal spatial light modulator

A technology of spatial light modulator and scanning device, which is applied in the field of confocal microscope and its scanning, can solve the problems of limiting scanning speed and precision, complex structure and control, achieve obvious effect, improve scanning precision and repeatability, and avoid precise scanning and complex control effects

Active Publication Date: 2013-07-31
HARBIN INST OF TECH
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Problems solved by technology

However, its structure and control are complex, and due to the mechanical characteristics of the galvanometer scanning technology itself, there will be inertia during scanning, which limits the scanning speed and accuracy.

Method used

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  • Confocal transverse scanning device and method based on reflection type liquid crystal spatial light modulator
  • Confocal transverse scanning device and method based on reflection type liquid crystal spatial light modulator
  • Confocal transverse scanning device and method based on reflection type liquid crystal spatial light modulator

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Embodiment Construction

[0020] The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0021] The schematic structural diagram of the confocal transverse scanning device based on the reflective liquid crystal spatial light modulator in this embodiment is as follows figure 1 As shown, the light beam emitted by the laser 1 passes through the beam expander 2, the polarizer 3 and the first dichroic prism 4 and then enters the reflective liquid crystal spatial light modulator 5, and the outgoing light beam modulated by the reflective liquid crystal spatial light modulator 5 passes through After being reflected by the first dichroic prism 4, it passes through the scanning lens 6, the tube mirror 7, the second dichroic prism 8 and the microscopic objective lens 9 to converge on the measured object 10. Dichroic prism 8, the light beam reflected by the second dichroic prism 8 is imaged on CCD13 through collecting objective le...

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Abstract

The invention discloses a confocal transverse scanning device and a confocal transverse scanning method based on a reflection type liquid crystal spatial light modulator, belongs to the technical field of optical precision measurement, and in particular relates to a confocal microscope and a scanning method thereof. The reflection type liquid crystal spatial light modulator is adopted to take the place of a transverse scanning mechanism in a conventional confocal transverse scanning device; and by changing the phase driving spectrum loaded by the reflection type liquid crystal spatial light modulator, the two-dimensional deviation of a light beam is realized, and the non-mechanical transverse scanning is realized. Due to such design, the microscope and a tested object both do not need to be transversely moved, but the transverse light beam scanning on the tested object is realized; not only is the precise and complex control on a three-dimensional micro-displacement platform avoided, but also the scanning precision and the repetitiveness are improved; and particularly, the effect is more remarkable for easily-deformed samples, so that the types of measured samples are widened.

Description

technical field [0001] A confocal transverse scanning device and method based on a reflective liquid crystal spatial light modulator belongs to the technical field of optical precision measurement, and specifically relates to a confocal microscope and a scanning method thereof. Background technique [0002] Since the 1980s, microelectronics technology, bioengineering, micro-optics and micro-opto-electromechanical system technology have entered a stage of rapid development. In the field of micro-scale, people pay more attention to the quantitative analysis of three-dimensional state. Ultra-precise measurement has become an important topic in modern testing technology and instrument research. The confocal microscopy measurement method has become an important research direction for three-dimensional microstructure measurement because of its unique tomographic ability, high resolution, and no damage to the measurement surface. [0003] Since the confocal microscopy measurement ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B21/00G02B21/36G02F1/13
Inventor 邹丽敏李佃蒙谭久彬
Owner HARBIN INST OF TECH
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