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Confocal axial scanning device and confocal axial scanning method based on reflection type liquid crystal spatial light modulator

A technology of spatial light modulator and scanning device, which is applied in the field of confocal microscope and its scanning, can solve the problems of poor repeatability of sample measurement and complex structure of the device, and achieve the expansion of sample measurement types, simple operation, and improvement of measurement accuracy and repeatability Effect

Active Publication Date: 2012-07-04
HARBIN INST OF TECH
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  • Application Information

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Problems solved by technology

[0006] The purpose of the present invention is to solve the existing axial scanning device and method because the defocusing of the measured object is realized by moving the objective lens or the measured object along the axial direction, resulting in complex structure of the device and poor measurement repeatability of the sample. Problem, provide a confocal axial scanning device and a confocal axial scanning method based on a reflective liquid crystal spatial light modulator

Method used

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  • Confocal axial scanning device and confocal axial scanning method based on reflection type liquid crystal spatial light modulator
  • Confocal axial scanning device and confocal axial scanning method based on reflection type liquid crystal spatial light modulator
  • Confocal axial scanning device and confocal axial scanning method based on reflection type liquid crystal spatial light modulator

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specific Embodiment approach 1

[0017] Specific implementation mode one: combine figure 1 To illustrate this embodiment, the confocal axial scanning device based on a reflective liquid crystal spatial light modulator described in this embodiment includes a laser 1, a converging lens 2, a first pinhole 3, an illumination objective lens 4, an aperture 5, and a polarization splitter Mirror 6, λ / 4 wave plate 7, reflective liquid crystal spatial light modulator 8, measured object 10, measuring objective lens 11, beam splitter 12, collecting objective lens 13, second pinhole 14 and light intensity detector 16, laser 1 The emitted parallel light beam is imaged to the first pinhole 3 through the converging lens 2, and the light beam passing through the first pinhole 3 is collimated by the illumination objective lens 4 and then incident on the polarization beam splitter 6 in parallel, and the polarization beam splitter 6 divides the incident light into reflection light and transmitted light, the reflected light is S ...

specific Embodiment approach 2

[0018] Specific implementation mode two: combination figure 1 This embodiment is described. The difference between this embodiment and the confocal axial scanning device based on the reflective liquid crystal spatial light modulator described in Embodiment 1 is that it also includes a translation stage 9, and the object 10 to be measured is placed on the translation stage 9 , the translation stage 9 can move one-dimensionally along the optical axis direction of the measuring objective lens 11 . Other components and connections are the same as those in Embodiment 1.

specific Embodiment approach 3

[0019] Specific implementation mode three: combination figure 1 Describe this embodiment. The difference between this embodiment and the confocal axial scanning device based on the reflective liquid crystal spatial light modulator described in Embodiment 1 is that it also includes a three-dimensional precision translation stage 15, and the light intensity detector 16 is placed in a three-dimensional On the precision translation platform 15, the three-dimensional precision translation platform 15 can perform three-dimensional motion. Other components and connections are the same as those in Embodiment 1.

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Abstract

A confocal axial scanning device and a confocal axial scanning method based on a reflection type liquid crystal spatial light modulator relate to a confocal microscope and a scanning method of the confocal microscope, which solve the problems that in an existing axial scanning device and a method, the device is complex in structure and a sample is poor in repeatability of measurement due to the fact that defocus of a measured object is achieved by means of a lens or movement of the measured object along an axial direction. By means of the confocal axial scanning device, the reflection type liquid crystal spatial light modulator is added between a polarization beam splitter and the lens of the existing device, an axial scanning mechanism in a traditional confocal axial scanning device is eliminated simultaneously, and the reflection type liquid crystal spatial light modulator is utilized to replace the axial scanning mechanism. The confocal axial scanning method adopts a mode of utilizing a computer to directly modulate a phase gray-scale figure to adjust wavefront of a light wave in front of the lens so that zoom is achieved, and axial scanning to the measured object can be achieved without axially moving the measurement lens and the measured object. The confocal axial scanning device and the confocal axial scanning method based on the reflection type liquid crystal spatial light modulator are applied to the confocal microscope and the scanning method of the confocal microscope.

Description

technical field [0001] The invention relates to a confocal microscope and a scanning method thereof. Background technique [0002] Since the 1980s, microelectronics technology, bioengineering, micro-optics and micro-opto-electromechanical system technology have entered a stage of rapid development. In the field of micro-scale, people pay more attention to the quantitative analysis of three-dimensional state. Ultra-precise measurement has become an important topic in modern testing technology and instrument research. The confocal measurement method has become an important research direction of three-dimensional microstructure measurement because of its unique advantages of high precision, high resolution, non-contact and easy realization of three-dimensional imaging digitization. One method of using confocal measurement method to realize three-dimensional microstructure measurement is to make the measured object move axially relative to the focus position, form a defocus sig...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B21/00G02B21/36G02F1/13
Inventor 邹丽敏侯斯靓谭久彬
Owner HARBIN INST OF TECH
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