Method for preparing copper-bismuth-sulfur film
A copper-bismuth-sulfur, thin-film technology, applied in ion implantation plating, metal material coating process, coating and other directions, can solve the problems of poor crystalline properties of semiconductor materials, electrical properties that cannot reach photovoltaic cells, and poor sample uniformity. , to achieve the effect of environmental protection process method, less impurity content and good film flatness
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Embodiment 1
[0039] A method for preparing copper-bismuth-sulfur thin films, the method steps are as follows:
[0040] Step 1. Put the glass with a thickness of 2mm into the mixed solution prepared by micro-90 and deionized water at a mass ratio of 1:50, then heat it to 70°C, keep it for 15 minutes, continue to heat up to 90°C, and ultrasonically clean it for 15 minutes , take out the glass and rinse it with deionized water for 5 times, and then use N 2 blow dry glass;
[0041] Step 2. Vacuum evaporation metal bismuth thin film and CuS thin film
[0042] Put the glass on the stage in the vacuum evaporation device, set the speed of the stage to 10r / min, and control the chamber pressure of the vacuum evaporation device at 1×10 -5 Pa~5×10 -2 Within the range of Pa, turn on the power of the bismuth evaporation source to heat the bismuth evaporation source to 280°C, then open the baffle on the stage to start the evaporation of metal bismuth, measured by the crystal oscillator film thickness ...
Embodiment 2
[0046] A method for preparing copper-bismuth-sulfur thin films, the method steps are as follows:
[0047] Step 1. Put the glass with a thickness of 4mm into the mixed solution prepared by micro-90 and deionized water at a mass ratio of 1:50, then heat it to 60°C, keep it for 30 minutes, then continue to heat up to 80°C, and ultrasonically clean it for 30 minutes , take out the glass and rinse it three times with deionized water, and then use N 2 blow dry glass;
[0048] Step 2. Vacuum evaporation metal bismuth thin film and CuS thin film
[0049] Put the glass on the stage in the vacuum evaporation device, set the speed of the stage to 10r / min, and control the chamber pressure of the vacuum evaporation device at 1×10 -5 Pa~5×10 -2 Within the range of Pa, turn on the power of the bismuth evaporation source to heat the bismuth evaporation source to 300°C, then open the baffle on the stage to start the evaporation of metal bismuth, measured by the crystal oscillator film thick...
Embodiment 3
[0053] A method for preparing copper-bismuth-sulfur thin films, the method steps are as follows:
[0054] Step 1. Put the glass with a thickness of 1mm into the mixed solution prepared by micro-90 and deionized water at a mass ratio of 1:50, then heat it to 60°C, keep it for 30min, then continue to heat up to 90°C, and ultrasonically clean it for 15min , took out the glass and rinsed it four times with deionized water, and then washed it with N 2 blow dry glass;
[0055] Step 2. Vacuum evaporation metal bismuth thin film and CuS thin film
[0056] Put the glass on the stage in the vacuum evaporation device, set the speed of the stage to 10r / min, and control the chamber pressure of the vacuum evaporation device at 1×10 -5 Pa~5×10 -2 Within the range of Pa, turn on the power of the bismuth evaporation source to heat the bismuth evaporation source to 300°C, then open the baffle on the stage to start the evaporation of metal bismuth, measured by the crystal oscillator film thic...
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