Greenhouse based on two-channel CO2 detection
A greenhouse and dual-channel technology, applied in the direction of using sound waves/ultrasonic waves/infrasonic waves to analyze fluids, etc., can solve problems such as unsatisfactory results, and achieve the effects of increasing stability, ensuring reliability, and enhancing sensing capabilities
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Embodiment 1
[0042] This application provides a dual-channel CO based 2 The detected greenhouse, including the greenhouse body and the monitoring CO installed inside the greenhouse 2 , NO 2 SAW sensor for gas concentration; such as figure 1 The schematic diagram of the SAW sensor structure is shown. The SAW sensor has a five-channel structure, wherein channel three is used as a reference channel, and the sensitive areas of channel one and channel two are coated with sensitive film material one (01) for CO 2 Gas detection; the sensitive area of channel 4 and channel 5 is coated with sensitive film material 2 (02) for NO 2 The detection of gas; the first and second channel sensitive film materials are three layers, and a layer of Ni film (03) is also magnetron sputtered between the sensitive film and the SAW device, and the thickness of the Ni film is 150nm; figure 2 show figure 1 The cross-sectional view of the coating sequence of Ni film and sensitive thin film material in the chann...
Embodiment 2
[0060] This application provides a dual-channel CO based 2 The detected greenhouse, including the greenhouse body and the monitoring CO installed inside the greenhouse 2 , NO 2 SAW sensor for gas concentration; such as figure 1 The schematic diagram of the SAW sensor structure is shown. The SAW sensor has a five-channel structure, wherein channel three is used as a reference channel, and the sensitive areas of channel one and channel two are coated with sensitive film material one (01) for CO 2 Gas detection; the sensitive area of channel 4 and channel 5 is coated with sensitive film material 2 (02) for NO 2 The detection of gas; the first and second channel sensitive film materials are three layers, and a layer of Ni film (03) is also magnetron sputtered between the sensitive film and the SAW device, and the thickness of the Ni film is 170nm; figure 2 show figure 1 The cross-sectional view of the coating sequence of Ni film and sensitive thin film material in the chann...
Embodiment 3
[0077] This application provides a dual-channel CO based 2 The detected greenhouse, including the greenhouse body and the monitoring CO installed inside the greenhouse 2 , NO 2 SAW sensor for gas concentration; such as figure 1 The schematic diagram of the SAW sensor structure is shown. The SAW sensor has a five-channel structure, wherein channel three is used as a reference channel, and the sensitive areas of channel one and channel two are coated with sensitive film material one (01) for CO 2 Gas detection; the sensitive area of channel 4 and channel 5 is coated with sensitive film material 2 (02) for NO 2 The detection of gas; the first and second sensitive film materials of the channel are three layers, and a layer of Ni film (03) is also magnetron sputtered between the sensitive film and the SAW device, and the thickness of the Ni film is 190nm; figure 2 show figure 1 The cross-sectional view of the coating sequence of Ni film and sensitive thin film material in th...
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Abstract
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