MEMS vibration energy collector based wireless sensor micro power supply

Abstract

The invention discloses an MEMS vibration energy collector based wireless sensor micro power supply, which comprises an energy conversion module, an energy collection and storage module and a boosting module, wherein the energy conversion module is used for converting environmental vibration energy into electric energy, the electric energy converted by the energy conversion module is transmitted to the energy collection and storage module; the energy collection and storage module comprises an ultra-low power consumption chip which acquires energy from the energy conversion module, realizes efficient collection of the electric energy and continuously supplies the weak electric energy converted by the energy conversion module to a battery so as to charge the battery; and the boosting module is used for boosting signals outputted by the energy collection and storage module to a set value. According to the invention, the micro power supply is secondarily integrated with a sensor to which energy is supplied, so that self power supply of the sensor is realized. The design disclosed by the invention further broadens the application range of a vibration energy collector, and also provides an opportunity for self power supply of a micro sensor at the same time.

Description

technical field [0001] The invention relates to the field of micro-energy sources and self-powered micro-wireless sensors, in particular to a micro-power source for wireless sensors based on a MEMS vibration energy harvester. Background technique [0002] As an important part of perceiving information in the physical world, sensors are currently powered by traditional batteries or power sources. However, traditional battery power supply methods have greatly limited the development and use of micro sensors due to their short life, inconvenient replacement, high replacement costs, and easy pollution of the environment. application. MEMS piezoelectric vibration energy harvester has the advantages of high energy conversion efficiency, simple structure, miniaturization, long life, no pollution, easy integration, etc. It can be integrated with micro sensors to form a micro power supply, thereby making the sensor system Released from the shackles of external power sources, fully r...

AI Technical Summary

Problems solved by technology

[0006] ① The experimental results of micro-device are in poor agreement with the theoretical results

Experiments such as micro-bending and micro-indentation prove that the size effect of the device reaches the micron level, and the traditional dynamics is difficult to explain the reason.

The output performance of the micro piezoelectric energy harvester is closely related to the structural parameters of the device. It is necessary to establish a complete theoretical model to optimize the structural parameters of the system, but there is currently a lack of systematic research in this area.

[0007] ②The resonant frequency of the device is high, which cannot be effectively matched with the surrounding low-frequency vibration environment

Most of the vibration energy in the surrounding environment is distributed within 200Hz. When the resonance frequency of the vibration energy harvester is high, it cannot match the environment well, and thus cannot effectively convert the vibration energy into electrical energy.

[0008] ③At present, the application field of micro-output MEMS energy harvester is small

Due to the low output voltage (mV) and power (μW) of the MEMS collector, combined with the existing interface circuit, it can only provide power for the equipment to be powered with low power consumption and short-time work, while for the equipment with a higher rated voltage The equipment cannot effectively supply power, which greatly limits the application fields of MEMS collectors

Images