Continuous production of photo-sensitive glass bodies
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example 1
[0198] By pressing glass B1 in a mold, a glass body with a thickness of 15 mm was produced. The melt is thus cooled in the mold in such a way that it passes through the temperature range from 990° C. to 600° C. within 11 minutes. By subsequent sensitization, the glass was adjusted to a cooling state corresponding to cooling from 500° C. to 240° C. at an average cooling rate of 80° C. / h. The glass was sawn, ground and polished so as to be adjusted to a thickness of 0.5 mm. The transmittance was measured at a wavelength of 280 nm at different positions of the glass. 40 measurements were made, and the average value of the transmittance was 30%. The glass is so homogeneous that the standard deviation of the transmittance is only about 0.4% of the average value of the transmittance.
[0199] Using a wavelength of 320nm and a dose of 10J / cm 2 UV light is used to expose the vitreous. In order to generate via holes with a diameter of 40 μm and a hole center distance of 60 μm, the...
example 2
[0201] Vitreous bodies were produced and exposed as in Example 1. However, the tempering temperature was varied to study its effect on the etch rate. The highest etch ratio was obtained at a tempering temperature of 580°C.
example 3
[0203] Glass was produced and processed as in Example 1. However, change the designed hole diameter. The results show that the standard deviation is independent of the designed hole diameter.
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Abstract
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